EMG nanofab techniques

Equipment

EMG nanofab techniques

A number of techniques for film preparation and characterizaion are available within EMG, including:

Nanofab

Magnetron sputtering of thin films, including Nb, Py, and Au
Pulsed laser deposition (PLD) of YBCO superconductor films
Cleanroom with an SEM for electron-beam lithography
Mask aligners and a cleanbench for optical lithography
Atomic force and magnetic force microscopy (AFM/MFM)

mBLS frame

EMG's 3D printers enable prototyping of custom-designed components.

Mechanical Workshop at EMG enables the fabrication of custom-designed parts and components for various setups and devices, including

Mechanical parts for optical setups
Sample holders for low-temperature setups

EMG | Haus der Elektrotechnik

Hans-Sommer-Str. 66