Supporting Information

Investigation of a hybrid discharge mode of a pin-to-plate DBD in Ar-hexamethyldisilane and its influence on thin film deposition

Lars Bröcker, Claus-Peter Klages, Markus M. Becker, Detlef Loffhagen and Marjan Stankov

This video shows the discharge appearance of the hybrid mode mentioned in the publication “Investigation of a hybrid discharge mode of a pin-to-plate DBD in Ar-hexamethyldisilane and its influence on thin film deposition”. In the beginning, a clearly formed diffusive region in the upper part of the discharge gap is present and, for the first few seconds, a strongly contracted, bright region with a diameter of approximately 100 µm in front of the Si wafer is visible. Afterwards, stochastically moving, thin discharge channels appear between the diffuse plasma region and the grounded silicon substrate. For larger times or high monomer fractions, the discharge appears as an atmospheric-pressure glow discharge (APGD).