apl. Prof. Dr. Erwin Peiner

Funded research projects:

• 10/2021 - 12/2022: "Photovoltaik mit kristallinem Silizium auf Fenster-Glas (PV-CSS) ", funded by BMWi, 03THWNI009.
• 02/2021 - 01/2024: "3D nano-engineered silicon anodes for high-energy-density lithium-ion rechargeable batteries - SiNanoBatt; Fabrication technology for 3D silicon nanoanodes with high aspect ratio", (Project coordinator, with Dr.-Ing Hutomo Suryo Wasisto) funded by BMBF, 01DP21003, Collaborative project with Institut Teknologi Bandung (ITB), Indonesia (Dr. Afriyanti Sumboja) and Chulalongkorn University, Thailand (Dr. Vudhichai Parasuk).
• 09/2020 - 08/2023: "High throughput metrology for nanowire energy harvesting devices - Nanowires", funded by EU/EURAMET/EMPIR, 19ENG05, Collaborative project with PTB (Dr. Uwe Brand) and fourteen further partners.
• 12/2018 - 12/2020: "Perspektive zur Solarzelle aus der kristallinen Siliziumsynthese - CSS for solarcell", funded by DBU, Az.: 32945/03, Collaborative project with sameday media GmbH (Dr. Ingrid Schall).
• 06/2018 - 11/2021: "Multifunctional ultrafast microprobes for on-the-machine measurements - MicroProbes", (WP leader), funded by  EU/EURAMET/EMPIR, 17IND05, Collaborative project with PTB (Dr. Uwe Brand) and ten further partners.
• 11/2016 – 10/2021: "Forschungslinie Quanten- und Nanometrologie - QUANOMET: Nachwuchsgruppe Nanopartikel Charakterisierung (NP2) (PI)", funded by NMWK; ZN3245.
• 04/2017 – 09/2018: "Synthese von multikristallinem Dünnschicht-Silizium für die elektronische Anwendung - crystalline silicon synthesis (CSS)", funded by DBU, Az.: 32945/2, Collaborative project with sameday media GmbH (Dr. Ingrid Schall).
• 04/2015 – 12/2018: "Atomic transport in three-dimensional nanostructures of silicon and germanium - Nanodiff", funded by DFG, PE 885/3-1, Collaborative project with Univ. Münster (Prof. Hartmut Bracht).
• 09/2015 – 12/2016: "Synthese von kristallinem Silizium auf Quarzsubstrat - c-Si-on-Quartz", funded by DBU, Az.: 32945/01- 24, Collaborative project with sameday media GmbH (Dr. Ingrid Schall).
• 08/2013 – 01/2017: "Hochgeschwindigkeitsmikrotaster für die Messung an Oberflächen von Strukturen mit großem Aspektverhältnis - HmtS", (Project coordinator), funded by BMBF, 03V0409, (Final report (in German) available in TIB-Portal), Collaborative project with PTB (Dr. Uwe Brand, Final report (in German) available in TIB-Portal).
• 05/2010 – 10/2013: "Nanobalancedetektor für personenbezogene Messungen von Nanopartikel-Expositionen - NanoExpo" (Project coordinator) - Subproject: "Nanopartikeldosimeter - Nosi", with Prof. Andreas Waag, funded by BMBF, 03X0098A, (Final report (in German) available in TIB-Portal), Collaborative project with Fraunhofer-WKI (Dr. Erik Uhde, Prof. Tunga Salthammer).
• 06/2009 – 08/2012: "Nanostrukturierte Thermoelektrika: Silicon-based thermoelectric nanosystems - SiNanoTherm", with Prof. Andreas Waag, funded by DFG, SPP 1386/1, PE 885/2-1, with Univ. Würzburg (Prof. Karl Brunner).
• 01/2009 – 11/2014: "Geothermie und Hochleistungsbohrtechnik - GeBo", - Subproject T2: "Aufbau- und Verbindungstechnik für Hochtemperatur-Elektronik", with Prof. Andreas Waag, funded by State of Lower Saxony and Baker-Hughes-INTEQ GmbH, Collaborative project with TU Clausthal, LU Hannover and LIAG.
• 01/2005 – 06/2008: "Prüfung und Bewertung geometrischer Merkmale in der Mikrosystemtechnik - µgeoMess" - Subproject: "Vorentwicklung und Optimierung eines Mikrotasters - µTast", funded by BMBF, 16SV1944, Collaborative project with Mahr GmbH (Dr. Andreas Beutler), PTB, CiS GmbH, Fraunhofer-ICT-IMM and Continental Automotive GmbH.
• 08/2003 – 03/2005: "Die Intelligente Kraftmessung: Innovativer diamantartiger Kraftsensor für die Verschraubungs- und Spanntechnik - DiaKra" - Subproject: "Anwendungsbezogene Weiterentwicklung des Schichtmaterials", funded by BMWA, 16IN0223, Collaborative project with Fraunhofer-IST (Dipl.-Ing. Holger Lüthje), Fraunhofer-IMS, Univ. Erlangen and four partners from industry.

PhD projects:

• Dr.-Ing. Andi Setiono,
  "Parasitic-crosstalk elimination in electrothermal piezoresistive cantilever resonators for real-time frequency-tracking operation",
  Fakultät für Elektrotechnik, Informationstechnik, Physik of TU Braunschweig, 2021, funded by a scholarship of the Ministry of Research, Technology and Higher Education of the Republic of Indonesia (RISTEKDIKTI, Nr. 343/RISET-Pro/FGS/VII/2016).
• Dr.-Ing. Wilson Ombati Nyang‘au,
  "Microcantilever-based measurement of mass and magnetic moment of liquidborne magnetic micro and nanoparticles",
  Fakultät für Elektrotechnik, Informationstechnik, Physik of TU Braunschweig, 2021, supported by the German Federal Ministry for Economic Cooperation and Development (BMZ, no 27070024).
• Dr.-Ing. Maik Bertke,
  „MEMS/NEMS-basierte Sensoren für die Detektion und Charakterisierung von Nanopartikeln”,
  Fakultät für Elektrotechnik, Informationstechnik, Physik of TU Braunschweig, 2020,
  awarded as particularly good thesis by the Stiftung der Ingenieurkammer Niedersachsen, 2021
• Dr.-Ing. Jiushuai Xu,
  "Wearable gas sensors based on silicon MEMS/NEMS-based resonators",
  Fakultät für Elektrotechnik, Informationstechnik, Physik of TU Braunschweig, 2020, supported by China Scholarship Council (CSC, no. 201506300019
• Dr.-Ing. Gerry Hamdana,
  "MEMs piezoresistive force sensors based on micro-/nanostructured silicon components",
  Fakultät für Elektrotechnik, Informationstechnik, Physik der TU Braunschweig, 2018
• Dr.-Ing. Hutomo Suryo Wasisto,
  "Direct-reading personal airborne nanoparticle detector based on micromechanical silicon cantilever resonators",
  Fakultät für Elektrotechnik, Informationstechnik, Physik of TU Braunschweig, 2014,
  awarded with „Walter-Kertz-Studienpreis“ of the Fakultät Elektrotechnik, Informationstechnik, Physik, 2014
• Dr.-Ing. Andrej Stranz,
  „Untersuchung von einkristallinem Bulk-Silizium und Silizium-Nanosäulen für die thermoelektrische generatorische Energieumwandlung“,
  Fakultät für Elektrotechnik, Informationstechnik, Physik der TU Braunschweig, 2013
• Dr.-Ing. Arti Tibrewala,
  „Piezoresistive effect in diamond-like carbon films“,
  Fakultät für Elektrotechnik und Informationstechnik der TU Braunschweig, 2006

• Calvin Eldona, Naufal Hanif Hawari, Faiq Haidar Hamid, Wibke Dempwolf, Ferry Iskandar, Erwin Peiner, Hutomo Suryo Wasisto, and Afriyanti Sumboja,
  "A Free-Standing Polyaniline/Silicon Nanowire Forest as the Anode for Lithium-ion Batteries",
  Chem. Asian J. 2022, e202200946 (8pp); https://doi.org/10.1002/asia.202200946.
• Pierre Yosia Edward Koraag, Arief Muhammad Firdaus, Naufal Hanif Hawari, Andam Deatama Refino, Wibke Dempwolf, Ferry Iskandar, Erwin Peiner, Hutomo Suryo Wasisto, Afriyanti Sumboja,
  "Covalently Bonded Ball-Milled Silicon/CNT Nanocomposite as Lithium-Ion Battery Anode Material",
  Batteries 8 (2022) 165 (13pp); https://doi.org/10.3390/batteries8100165.
• Defang Li, Jinying Zhang, Jiushuai Xu, Erwin Peiner,
  "Single-step fabricated disordered pyramidal nanostructures for large-scale broadband visible light absorber with high-temperature stability",
  Applied Surface Science 601 (2022) 154279 (12pp); https://doi.org/10.1016/j.apsusc.2022.154279.
• Jan K. Prüßing, Tim Böckendorf, Felix Kipke, Jiushuai Xu, Prabowo Puranto, John Lundsgaard Hansen, Dominique Bougeard, Erwin Peiner, and Hartmut Bracht,
  "Retarded Boron and Phosphorus Diffusion in Silicon Nano Pillars due to Stress Induced Vacancy Injection",
  J. Appl. Phys. 131 075702 (2022); https://doi.org/10.1063/5.0078006.
• Min Xu, Ziqi Zhou, Thomas Ahbe, Erwin Peiner, Uwe Brand,
  "Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements",
  Sensors 22 (2022) 1298 (15pp); https://doi.org/10.3390/s22031298.
• Andika Pandu Nugroho, Naufal Hanif Hawari, Bagas Prakoso, Andam Deatama Refino, Nursidik Yulianto, Ferry Iskandar, Evvy Kartini, Erwin Peiner, Hutomo Suryo Wasisto, Afriyanti Sumboja,
  "Vertically aligned n-type silicon nanowire array as a free-standing anode for lithium-ion batteries",
  Nanomaterials 11 (2021) 3137 (13pp); https://doi.org/10.3390/nano11113137.
• Andam Deatama Refino, Nursidik Yulianto, Iqbal Syamsu,
  Andika Pandu Nugroho, Naufal Hanif Hawari, Alina Syring, Evvy Kartini,
  Ferry Iskandar, Tobias Voss, Afriyanti Sumboja, Erwin Peiner,
  Hutomo Suryo Wasisto,
  "Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium‑ion battery anode",
  Scientific Reports 11 (2021) 19779 (15pp); https://doi.org/10.1038/s41598-021-99173-4.
• Linus Teir, Tuomas Lindstedt, Thomas Widmaier, Björn Hemming, Uwe Brand, Michael Fahrbach, Erwin Peiner and Antti Lassila,
  "In-line measurement of the surface texture of rolls using long slender piezoresistive microprobes",
  Sensors 21 (2021) 5955 (14pp); https://doi.org/10.3390/s21175955;
• Wilson Ombati Nyang’au, Tamara Kahmann, Thilo Viereck, Erwin Peiner,
  "MEMS-based cantilever sensor for simultaneous measurement of mass and magnetic moment of magnetic particles",
  Chemosensors 9 (2021) 207 (19pp); https://doi.org/10.3390/chemosensors9080207.
• Andi Setiono, Michael Fahrbach, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Iqbal Syamsu, Hutomo Suryo Wasisto, Erwin Peiner,
  "Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure",
  Sensors 21 (2021) 4088 (19pp); doi: 10.3390/s21124088.
• Maik Bertke, Ina Kirsch, Erik Uhde, Erwin Peiner,
  "Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel",
  Sensors 21 (2021) 3731 (19pp); doi: 10.3390/s21113731.
• Michael Fahrbach, Sebastian Backes, Heinrich Behle, Min, Xu, Brunero Cappella, Uwe Brand, Erwin Peiner,
  "Customized piezoresistive microprobes for combined imaging of topography and mechanical properties",
  Measurement: Sensors 15 (2021) 100042 , https://doi.org/10.1016/j.measen.2021.100042; data available.
• Min Xu, Zhi Li, Michael Fahrbach, Erwin Peiner, Uwe Brand, “Investigating the trackability of silicon microprobes in high-speed surface measurements”, Sensors 21 (2021) 1557 (13pp); doi: 10.3390/s21051557.
• Michael Fahrbach, Sebastian Friedrich, Brunero Cappella, Erwin Peiner, “Calibrating a high-speed contact-resonance profilometer”, J. Sens. Sens. Syst. 9 (2020) 179–187, https://doi.org/10.5194/jsss-9-179-2020.
• Wilson Ombati Nyang’au, Andi Setiono, Angelika Schmidt, Harald Bosse, Erwin Peiner, "Sampling and Mass Detection of a Countable Number of Microparticles Using on-Cantilever Imprinting", Sensors 20(9) (2020) 2508; https://doi.org/10.3390/s20092508.
• Jan K. Prüßing, Tim Böckendorf, Gerry Hamdana, Erwin Peiner, Hartmut Bracht, “Defect distribution in boron doped silicon nanostructures characterized by means of scanning spreading resistance microscopy”, J. Appl. Phys. 127 (2020) 055703; doi: 10.1063/1.5134558.
• Andi Setiono, Maik Bertke, Wilson Ombati Nyang’au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner,  “In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection”, Sensors 20(3) (2020) 618 (18pp); https://doi.org/10.3390/s20030618.
• Maik Bertke, Jiushuai Xu, Andi Setiono, Ina Kirsch, Erik Uhde, Erwin Peiner, "Fabrication of a micro-cantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection”, J. Micromech. Microeng. 30 (2020) 014001 (13pp); DOI: 10.1088/1361-6439/ab4e56.
• Andi Setiono, Wilson Ombati Nyang’au, Michael Fahrbach, Jiushuai Xu, Maik Bertke, Hutomo Suryo Wasisto, Erwin Peiner, “Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement”, J. Micromech. Microeng. 29 (2019) 124006 (12pp); doi.org/10.1088/1361-6439/ab4e29.
• Wilson Ombati Nyang’au, Andi Setiono, Maik Bertke, Harald Bosse, Erwin Peiner, “Cantilever-droplet-based sensing of magnetic particle concentrations in liquids”, Sensors 19 (2019) 4758 (18pp); doi:10.3390/s19214758.
• Zhi Li, Sai Gao, Uwe Brand, Karla Hiller, Susann Hahn, Gerry Hamdana, Erwin Peiner, Helmut Wolff, Detlef Bergmann, “Nanomechanical characterization of vertically aligned nanopillars using a MEMS-SPM nano-bending testing platform”, Sensors 19 (2019) 4529 (13pp); doi:10.3390/s19204529.
• Dennis Zillmann, David Metz, Barbara Matheis, Andreas Dietzel, Andreas Waag, Erwin Peiner, “Thermoelectric generators fabricated from large-scale produced Zr-/Hf-based half-Heusler compounds using Ag sinter bonding”, J. Electron. Mater. 48 (2019) 5363-5374; https://doi.org/10.1007/s11664-019-07366-5.
• Mariana, J. Gülink, G. Hamdana, F. Yu, K. Strempel, H. Spende, N. Yulianto, T. Granz, J. D. Prades, E. Peiner, A. Waag, H. S. Wasisto,“Vertical GaN Nanowires and Nanoscale Light-Emitting-Diode Arrays for Lighting and Sensing Applications”, ACS Applied Nano Materials 2 (2019) 4133-4142; doi: an-2019-00587v.
• Erwin Peiner und Hutomo Suryo Wasisto, "Editorial: Cantilever Sensors", Sensors 19 (2019) 2043; doi:10.3390/s19092043.
• J. Xu, M. Bertke, H. S. Wasisto, E. Peiner, Invited Topical Review: “Piezoresistive Microcantilevers for Humidity Sensing”,J. Micromech. Microeng. 29 (2019) 053003 (29pp), doi.org/10.1088/1361-6439/ab0cf5.
• U. Brand, M. Xu, L. Doering, J. Langfahl-Klabes, H. Behle, S. Bütefisch, T. Ahbe, E. Peiner, T. Frank, B. Mickan, I. Kisilev, M. Hauptmannl, M. Drexel, “Long slender piezoresistive silicon microprobes for fast measurements of roughness and mechanical properties inside microholes with diameters below 100 µm”, Sensors 19 (2019) 1410; doi:10.3390/s19061410.
• J. K. Prüßing, G. Hamdana, D. Bougeard, E. Peiner, H. Bracht, “Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation”, J. Appl. Phys. 125 (2019) 085105; https://doi.org/10.1063/1.5066617.
• J. Toledo, V. Ruiz-Díez, M. Bertke, H. S. Wasisto, E. Peiner, J. L. Sánchez-Rojas, "Piezoelectric MEMS resonators for cigarette particle detection”, Micromachines 10 (2019) 145; https://doi.org/10.3390/mi10020145.
• M. Bertke, J. Xu, M. Fahrbach, A. Setiono, H. S. Wasisto, E. Peiner, “Strategy toward miniaturized, self-out-readable resonant cantilever and integrated electrostatic microchannel separator for highly sensitive airborne nanoparticle detection”, Sensors 19 (2019) 901; doi:10.3390/s19040901.
• A. Setiono, J. Xu, M. Bertke, W. O. Nyang’au, M. Fahrbach, H. S. Wasisto, E. Peiner, “Real-time frequency tracking of an electro-thermal resonant cantilever sensor with ZnO nanorods for chemical sensing”, Chemosensors 7 (2019) 2; doi:10.3390/chemosensors7010002.
• A. Setiono, M. Fahrbach, M. Bertke, J. Xu, G. Hamdana, H. S. Wasisto, E. Peiner, “Phase optimization of thermally-actuated piezoresistive resonant MEMS cantilever sensors”, J. Sens. Sens. Syst. 8 (2019) 37–48; https://doi.org/10.5194/jsss-8-37-2019.
• S. Mariana, G. Hamdana, J. Dickmann, M. Bertke, C. Michel, J. Meyer, N. Yulianto, G. Cagnoli, E. Peiner, A. Waag, M. Granata, S. Kroker, H. S. Wasisto, "Fabrication of SiO2 microcantilever arrays for mechanical loss measurements”, Materials Research Express 6 (2019) 045206; doi.org/10.1088/2053-1591/aafab7.
• M. F. Fatahilah, P. Puranto, F. Yu, J. Langfahl-Klabes, A. Felgner, Z. Li, M. Xu, F. Pohlenz, T. Granz, K. Strempel, E. Peiner, U. Brand, A. Waag, H. S. Wasisto, “Traceable Nanomechanical Metrology of GaN Micropillar Array”, Adv. Eng. Mater. 20 (2018) 1800353; DOI: 10.1002/adem. 201800353.
• G. Hamdana, P. Puranto, J. Langfahl-Klabes, Z. Li, F. Pohlenz, Min Xu, T. Granz, M. Bertke, H. S. Wasisto, U. Brand, E. Peiner, “Determination of nanomechanical properties of crystalline silicon pillars by nanoindentation”, Sens. Actuat. A Phys. 283 (2018) 65–78; doi.org/10.1016/j.sna.2018.09.035.
• M. Bertke, M. Fahrbach, G. Hamdana, J. Xu, H. S. Wasisto, E. Peiner, "Contact Resonance Spectroscopy for On-The-Machine Manufactory Monitoring”, Sens. Actuat. A 279 (2018) 501–508; doi: 10.1016/j.sna.2018.06.012.
• J. Xu, M. Bertke, X. Li, H. Mu, H. Zhou, F. Yu, G. Hamdana, A. Schmidt, H. Bremers, E. Peiner, "Fabrication of ZnO Nanorods and Chitosan@ZnO Nanorods on MEMS Piezoresistive Self-Actuating Silicon Microcantilever for Humidity Sensing”, Sensors & Actuators: B. Chemical 273 (2018) 276–287; doi: 10.1016/j.snb.2018.06.017.
• D. Zillmann, A. Waag, E. Peiner, M.-H. Feyand, A. Wolyniec, "Thermoelectric and structural properties of large-scale produced Zr-/Hf-based half-Heusler compounds”, J. Electron. Mater. 47 (2018), 1546-1554; https://doi.org/10.1007/s11664-017-5917-7.
• T. Südkamp, G. Hamdana, M. Descoins, D. Mangelinck, H. S. Wasisto, E. Peiner, H. Bracht, “Self-diffusion in single crystalline silicon nanowires”, J. Appl. Phys. 123 (2018) 161515; doi: dx.doi.org/10.1063/1.4996987.

• M. Bertke, G. Hamdana, W. Wu, H. S. Wasisto, E. Uhde, E Peiner, "Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection", J. Micromech. Microeng. 27 (2017) 064001 (10pp); doi.org/10.1088/1361-6439/aa6b0d.

• G. Hamdana, L. Caccamo, M.  Bertke, T.  Südkamp, H. Bracht, H. S.  Wasisto, E. Peiner, "Enhanced colloidal lithography for fabrication of well-defined-area silicon nanowires", Microelectronic Engineering 179 (2017) 74-82; dx.doi.org/10.1016/j.mee.2017.04.030.

• G. Hamdana, M. Bertke, L. Doering, T. Frank, U. Brand, H. S. Wasisto, E. Peiner, "Transferable micromachined piezoresistive force sensor with integrated double-meander spring system", J. Sens. Sens. Syst. 6 (2017) 121–133, doi:10.5194/jsss-6-121-2017.

• F. Yu, S. Yao, F. Römer, B. Witzigmann, T. Schimpke, M. Strassburg, A. Bakin, H. Schumacher, E. Peiner, H. S. Wasisto, A. Waag, "GaN nanowire arrays with nonpolar sidewalls for vertically integrated field-effect transistors", Nanotechnology 28 (2017) 095206 (9pp); doi: 10.1088/1361-6528/aa57b6.

• L. Doering, U. Brand, S. Bütefisch, T. Ahbe, T. Weimann, E. Peiner, T. Frank, "High-speed microprobe for roughness measurements in high-aspect-ratio microstructures", Meas. Sci. Technol. 28 (2017) 034009 (9pp); doi:10.1088/1361-6501/28/3/034009.

• G. Hamdana, H. S. Wasisto, L. Doering, C. Yan, L. Zhou, U. Brand, E. Peiner, "Double meander spring silicon piezoresistive sensors as micro force calibration standards", Opt. Eng. 55(9), 091409 (2016), doi:10.1117/1.OE.55.9.091409, open access.

• H. S. Wasisto, E. Uhde, E. Peiner, "Enhanced performance of pocket-sized nanoparticle exposure monitor for healthy indoor environment“, Build. Environ. 95 (2016) 13-20; doi: 10.1016/j.buildenv.2015.09.013.

• A. Stranz, A. Waag, E. Peiner, "Investigation of thermoelectric parameters of Bi₂Te₃ - TEGs assembled using pressure-assisted silver powder sintering-based joining technology”, J. Electron. Mater. 44 (2015) 2055-2060; DOI: 10.1007/s11664-015-3655-2.

• H. S. Wasisto, S. Merzsch, E. Uhde, A. Waag, E. Peiner, "Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever", Microelectron. Eng. 145 (2015) 96–103; doi: 10.1016/j.mee.2015.03.037.
• H. S. Wasisto, S. Merzsch, E. Uhde, A. Waag, E. Peiner, "Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass  concentration monitoring", J. Sens. Sens. Syst. 4 (2015) 111–123; doi:10.5194/jsss-4-1-2015.

PhD thesis/Habilitation thesis/Book chapters:

• E. Peiner: Herstellung metastabiler Legierungen binärer Systeme mit positiver Bildungsenthalpie mit Hilfe der ionenstrahl-induzierten Durchmischung, Universität Bonn (1988) 
• E. Peiner: Silizium-Sensorik für die Maschinenüberwachung, Berichte aus der Halbleitertechnik, (Shaker-Verlag, Aachen, 2000)
• E. Peiner, "Compliant Tactile Sensors for High-Aspect-Ratio Form Metrology", in "Sensors - Focus on Tactile, Force and Stress Sensors" (I-Tech Education and Publication, Vienna, 2008, invited); DOI: 10.5772/6633.

• Jiushuai Xu and Erwin Peiner, "Dimensional-Nanopatterned Piezoresistive Silicon Microcantilever for Environmental Sensing", in "Advanced MEMS/NEMS Fabrication and Sensors", Editor: Dr. Zhuoqing Yang (Springer Nature Switzerland AG, 2022), 19-47; https://link.springer.com/chapter/10.1007%2F978-3-030-79749-2_2.

Articles in international peer-reviewed journals:

• J. Meissner, K. Kopitzki, G. Mertler, E. Peiner, "Ion Beam Mixing of selected binary systems of metals of different crystalline structures", Nucl. Instr. and Meth. in Phys. Res. B 19/20 (1987) 669-672.
• E. Peiner, K. Kopitzki, "Metastable phases formed by Ion Beam Mixing of binary metal systems with positive heats of formation", Nucl. Instr. and Meth. in Phys. Res. B 34 (1988) 173-180.
• W. Hiller, M. Buchgeister, P. Eitner, K. Kopitzki, V. Lilienthal, E. Peiner, "Ion Beam Mixing of Selected Binary Metal Systems with Large Positive Heats of Formation", Mater. Sci. Eng. A 115 (1989) 151-154.
• M. Buchgeister, W. Hiller, W. Jager, K. Kopitzki, G. Mertler, E. Peiner, "Different Crystalline Structures of Ruthenium-rich Metastable Phases Formed by Ion Beam Mixing of the Binary Systems Au-Ru and Ag-Ru", Mater. Sci. Eng. A 115 (1989) 155-160.
• E. Peiner, A. Schlachetzki, "Anodic Dissolution during Electrochemical Carrier-Concentration Profiling of Silicon", J. Electrochem. Soc. 139 (1992) 552-557.
• K. Hansen, E. Peiner, A. Schlachetzki, H. Burkhard, "Anisotropy and Lateral Homogeneity of InP-Mass Transport", Jpn. J. Appl. Phys. 31 (1992) L1153-L1156. 
• E. Peiner, A. Schlachetzki, "Automatic Counting of Etch Pits in InP", J. Electron. Mater. 21 (1992) 887-892; DOI: https://doi.org/10.1007/BF02665545. 
• G.-P. Tang, E. Peiner, H.-H. Wehmann, A. Lubnow, G. Zwinge, A. Schlachetzki, J. Hergeth, "A new maskless selective-growth process for InP on (100) Si", J. Appl. Phys. 72 (1992) 4366-4368.
• K. Hansen, E. Peiner, A. Schlachetzki, W. Mohling, H. Menniger, "Zn-doped InGaAsP (1.3 µm) contact layer for an inverted DH laser structure", J. Cryst. Growth, 125 (1992) 465-476. 
• K. Hansen, E. Peiner, G.-P. Tang, A. Schlachetzki, "A Theoretical Model of InP Mass Transport", Jpn. J. Appl. Phys. 32 (1993) 234-238. 
• R. Klockenbrink, E. Peiner, H.-H. Wehmann, A. Schlachetzki, "Wet Chemical Etching of Alignment V-Grooves in (100) InP through Titanium or In0.53Ga0.47As Masks", J. Electrochem. Soc. 141 (1994) 1594-1599. 
• A. Lubnow, G.-P. Tang, H.-H. Wehmann, E. Peiner, A. Schlachetzki, "Effect of III/V-Compound Epitaxy on Si Metal-Oxide-Semiconductor Circuits", Jpn. J. Appl. Phys. 33 (1994) 3628-3634. 
• K. Hansen, E. Peiner, A. Schlachetzki, M. von Ortenberg, "Dopant Activation Energy and Hole Effective Mass in Heavily Zn-Doped InP", J. Electron. Mater. 23 (1994) 935-941; DOI: https://doi.org/10.1007/BF02655368. 
• K. Hansen, E. Peiner, G.-P. Tang, A. Bartels, A. Schlachetzki, "Scattering mechanisms and defects in InP epitaxially grown on (001) Si substrates", J. Appl. Phys. 76 (1994) 4705-4712. 
• E. Peiner, K. Hansen, A. Schlachetzki, "Thickness control of InP and In0.53Ga0.47As thin films by energy-dispersive X-ray spectrometry, Thin Solid Films 256 (1995) 143-147. 
• E. Peiner, A. Schlachetzki, D. Kruger, "Doping Profile Analysis in Si by Electrochemical Capacitance- Voltage Measurements", J. Electrochem. Soc. 142 (1995) 576-580.
• R. Klockenbrink, E. Peiner, H.-H. Wehmann, A. Schlachetzki, "Area-selective Diffusion of Zn in InP/In0.53Ga0.47As/InP for Lateral pn Photodiodes", J. Electrochem. Soc. 142 (1995) 985-989. 
• A. Bartels, E. Peiner, A. Schlachetzki, "Substrate effect on the transport properties of semiconducting films", J. Appl. Phys. 77 (1995) 1621-1626. 
• A. Bartels, E. Peiner, R. Klockenbrink, A. Schlachetzki, "The distribution of charge concentration in InP/Si", J. Appl. Phys. 78 (1995) 224-228. 
• A. Bartels, E. Peiner, A. Schlachetzki, "A procedure for temperature-dependent, differential van der Pauw measurements", Rev. Sci. Instrum. 66 (1995) 4271-4276. 
• A. Bartels, E. Peiner, A. Schlachetzki, "The effect of dislocations on the transport properties of III/V-compound semiconductors on Si", J. Appl. Phys. 78 (1995) 6141-6146. 
• R. Klockenbrink, E. Peiner, A. Bartels, H.-H. Wehmann, A. Schlachetzki, "Performance of InGaAs Photodetectors: Lateral p-n and p-n-p Diodes", IEEE Phot. Technol. Lett. 7 (1995) 1480-1482. 
• R. Kuzmenko, A. Gansha, J. Schreiber, W. Kircher, S. Hildebrandt, S. Mo, E. Peiner, "Stress- Induced E0 Photoreflectance Spectra on GaAs/Si and InP/Si Heterostructures", phys. stat. sol (a) 152 (1995) 133-146. 
• E. Peiner, K. Hansen, M. Lübbe, A. Schlachetzki, "Unintentional Redistribution of Zn in In- GaAsP/InP Heterostructures", Jpn. J. Appl. Phys. 35 (1996) 557-563. 
• E. Peiner, S. Mo, H. Iber, G.-P. Tang, A. Schlachetzki, "Characterization of thin buffer layers for strongly mismatched heteroepitaxy", Thin Solid Films 283 (1996) 226-229. 
• A. Bartels, E. Peiner, G.-P. Tang, R. Klockenbrink, H.-H. Wehmann, A. Schlachetzki, "Performance of InGaAs Metal-Semiconductor-Metal Photodetectors on Si", IEEE Phot. Technol. Lett. 8 (1996) 670-672. 
• H. Iber, E. Peiner, A. Schlachetzki, "The effect of dislocations on the optical absorption of heteroepitaxial InP and GaAs on Si", J. Appl. Phys. 79 (1996) 9273-9277. 
• S. Mo, E. Peiner, A. Bartels, G.-P. Tang, A. Schlachetzki, R. Kuzmenko, S. Hildebrandt, J. Schreiber, "Photoreflectance Study on the Effect of Lattice Defects in InP on (001) Si", Jpn. J. Appl. Phys. 35 (1996) 4238-4246. 
• L. Malacký, R. Kúdela, M. Morvic, M. Cernianský, E. Peiner, H.-H. Wehmann, "Delta-doped InGaP grown by low pressure metalorganic chemical vapor deposition", Appl. Phys. Lett. 69 (1996) 1731-1733. 
• L. Kempen, U. Harms, H. Neuhäuser, D. Scholz, E. Peiner, A. Schlachetzki, "Internal Friction of Amorphous Zr65Al7.5Cu27.5-Films", J. de Physique IV (suppl. au J. de Physique III 6) (1996) C8-643 - C8-646; DOI: https://doi.org/10.1051/jp4:19968138. 
• E. Peiner, H.-H. Wehmann, H. Iber, S. Mo, G.-P. Tang, A. Bartels, A. Schlachetzki, A. Koch, K. Dettmer, M. Hollfelder, "High-quality In0.53Ga0.47As on exactly (001)-oriented Si grown by metal-organic vapour-phase epitaxy", J. Cryst. Growth 172 (1997) 44-52. 
• H. Iber, S. Mo, E. Peiner, G. Vollrath, A. Schlachetzki, F. Fiedler, "Characterization of surface damage in dry-etched InP", Semicond. Sci. Technol. 12 (1997) 755-759. 
• H. Fritsch, R. Lucklum, T. Iwert, P. Hauptmann, D. Scholz, E. Peiner, A. Schlachetzki, "A low-frequency micromechanical resonant vibration sensor for wear monitoring", Sensors and Actuators A 62 (1997) 616-620. 
• H. Fritsch, T. Iwert, R. Mikuta, P. Hauptmann, E. Peiner, A. Schlachetzki, "Kontinuierliche Lagerüberwachung und -diagnose mit resonanten mikromechanischen Vibrationssensoren", Technisches Messen 65 (tm 6/98) (1998) 229-235. 
• E. Peiner, D. Scholz, A. Schlachetzki, P. Hauptmann, "A micromachined vibration sensor based on the control of power transmitted between optical fibres", Sens. Actuators A 65 (1998) 23-29. 
• E. Peiner, D. Scholz, K. Fricke, A. Schlachetzki, P. Hauptmann, "Microelectromechanical Vibration Sensor with Optical Interconnects", J. Microelectromechanical Systems 7 (1998) 56- 61. 
• E. Peiner, K. Fricke, D. Fehly, A. Schlachetzki, P. Hauptmann, "Micromachined vibration sensor with on-chip circuitry and optical interconnects", Sens. Actuators A 68 (1998) 249-256. 
• S. Mo, E. Peiner, A. Schlachetzki, R. Klockenbrink, E. R. Weber, "Selected-area electronchanneling pattern as a characterization method for heteroepitaxial layers", Mater. Sci. Eng. B 56 (1998) 37-42. 
• E. Peiner, R. Mikuta, T. Iwert, H. Fritsch, P. Hauptmann, K. Fricke, A. Schlachetzki, "Micromachined Resonator for Cavitation Sensing", Sens. Actuators 76 (1999) 266-272. 
• R. V. Kuz'menko, A. V. Gansha, O. V. Bochurova, É. P. Domashevskaya, J. Schreiber, S. Hildebrandt, S. Mo, E. Peiner, "Strain-induced photoreflectance spectra in the vicinity of the E0 transition in GaAs/Si and InP/Si heterostructures", Phys. Sol. St. 41 (1999) 654-659; DOI: https://doi.org/10.1134/1.1130843. 
• K. Fricke, E. Peiner, M. Chahoud and A. Schlachetzki, "Fracture properties of epitaxial InP microcantilevers by heteromicromachining", Sens. Actuators 76 (1999) 395-402. 
• R. V. Kuz'menko, A. V. Gansha, O. V. Bochurova, É. P. Domashevskaya, J. Schreiber, S. Hildebrandt, S. Mo, E. Peiner, A. Schlachetzki, "Temperature Dependence of Residual Stress in Epitaxial GaAs/Si Films Determined from Photoreflectance Spectroscopy Data", Semiconductors 34 (2000) 73-80; DOI: https://doi.org/10.1134/1.1187949. 
• U. Harms, F. Klose, H. Neuhäuser, K. Fricke, E. Peiner, A. Schlachetzki, "Anelastic Properties of Aluminum Thin Films on Silicon Cantilevers", J. Alloys and Compounds 310 (2000) 449-453. 
• E. Peiner, K. Fricke, I. Behrens, A. Bakin, A. Schlachetzki, "Hetero-Micromachining of Epitaxial III/V-Semiconductors", Sens. Actuators 85 (2000), 324-329. 
• A. Bakin, I. Behrens, A. Ivanov, E. Peiner, D. Piester, H.-H. Wehmann, A. Schlachetzki, "Growth of 3C-SiC on Si(100) by LPCVD and Patterning of the Grown Layers", Mater. Sci. Forum 389-393 (2002) 327-330. 
• F. B. Klose, U. Harms, H. Neuhäuser, A. Bakin, I. Behrens, E. Peiner, H.-H. Wehmann, A. Schlachetzki, J. Rösler, "Elastic and anelastic properties of Fe doped InP films on silicon substrates", J. Appl. Phys. 91 (2002) 9031-9038. 
• I. Behrens, E. Peiner, A. Bakin, A. Schlachetzki, "Micromachining of Silicon Carbide on Silicon Fabricated by Low Pressure Chemical Vapour Deposition", J. Micromech. Microeng. 12 (2002) 380-384.
• Erwin Peiner, "Condition Monitoring with Axle Box Bearings Using Microelectromechanical Vibration Sensors", J. Micromech. Microeng. 12 (2002) 479-485. 
• E. Peiner, A. Guttzeit, H.-H. Wehmann, "Effect of threading dislocations on optical absorption and electron scattering in strongly mismatched heteroepitaxial III-V compound semiconductors on silicon", J. Phys: Cond. Mat. 14 (2002) 13195-13201. 
• A. Bakin, D. Piester, I. Behrens, H.-H. Wehmann, E. Peiner, A. Ivanov, D. Fehly, A. Schlachetzki, "Growth of InP Layers on Nanometer-Scale Patterned Si Substrates", Crystal Growth & Design, 3 (2003) 89-93. 
• I. Behrens, L. Doering, E. Peiner, "Piezoresistive Cantilever as Portable Micro Force Calibration Standard", J. Micromech. Microeng. 13 (2003) 171-177. 
• A. Koeder, S. Frank, W. Limmer, W. Schoch, V. Avrutin, R. Sauer, A. Waag, E. Peiner, A. Schlachetzki, "Depth dependence of magnetic and electric properties in GaMnAs layers", Int. J. Nanoscience 3 (2004) 115-121. 
• A. Nagy, A. Strahl, H. Neuhäuser, S. Schrader, I. Behrens, E. Peiner, A. Schlachetzki, "Mechanical spectroscopy of thin layers of PPV polymer on Si substrates", Mater. Sci. Eng. A 370 (2004) 311-315. 
• W. Limmer, A. Koeder, S. Frank, V. Avrutin, W. Schoch, R. Sauer, K. Zuern, P. Ziemann, E. Peiner, A. Waag, "Effect of annealing on the depth profile of hole concentration in (Ga,Mn)As", Phys. Rev. B 71 (2005) 205213.
• E. Peiner, L. Doering, "Force Calibration of Stylus Instruments using silicon microcantilevers", Sens. Actuat. A 123-124 (2005) 137-145. 
• E. Peiner, A. Tibrewala, R. Bandorf, S. Biehl, H. Lüthje, L. Doering, "Micro force sensor with piezoresistive amorphous carbon strain gauge", Sens. Actuat. A 130-131 (2006) 75-82. 
• A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje, T. Rabe, "Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films", Appl. Surf. Sci. 252 (2006) 5387-5390. 
• A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje, "Piezoresistive gauge factor of diamond-like carbon films", J. Micromech. Microeng. 16 (2006) S75-S81. 
• A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje,"Piezoresistive effect in amorphous carbon thin films", Mater. Sci. Technol. 23 (2007) 362-367. 
• Erwin Peiner, Arti Tibrewala, Ralf Bandorf, Holger Lüthje, Lutz Doering, Wolfgang Limmer, "Diamond-like carbon for MEMS", J. Micromech. Microeng. 17 (2007) S83-S90. 
• A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje, "The piezoresistive effect in diamond-like carbon films", J. Micromech. Microeng. 17 (2007) S77-S82. 
• A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje, "Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films", Thin Solid Films 515 (2007) 8028-8033.
• Erwin Peiner, Lutz Doering, Michael Balke, Andreas Christ, "Silicon Cantilever Sensor for Micro-/Nanoscale Dimension and Force Metrology", Microsyst. Technol. 14 (2008) 441-451; https://doi.org/10.1007/s00542-007-0436-8. 
• M. Balke, E. Peiner, L. Doering, "New micromachined sensor system for tactile measurements of high-aspect ratio microstructures", Microsyst. Technol.,14 (2008) 543-549; DOI: doi.org/10.1007/s00542-007-0436-8. 
• Erwin Peiner, Lutz Doering, Michael Balke, Andreas Christ, "Kontur-, Rauheits- und Kraftmesstechnik mit Silizium-Cantileversonden", Technisches Messen 75 (2008) 99-109. 
• E. Peiner, M. Balke, L. Doering, U. Brand, "Tactile probes for dimensional metrology with micro components at nanometre resolution", Meas. Sci. Technol. 19 (2008) 064001 (8pp). 
• Haramina, T., Kirchheim, R., Tibrewala, A., Peiner, E., "Mechanical spectroscopy of thin polystyrene films", Polymer 49 (2008) 2115-2118; DOI: https://doi.org/10.1016/j.polymer.2008.03.001. 
• S. Fündling, Ü. Sökmen, E. Peiner, T. Weimann, P. Hinze, U. Jahn, A. Trampert, H. Riechert, A. Bakin, H.-H. Wehmann, A. Waag, "Gallium-nitride heterostructures on 3D structured silicon", Nanotechnol. 19 (2008) 405301 (6pp). 
• Erwin Peiner, Lutz Doering, Michael Balke, "Slender Tactile Sensor for Contour and Roughness Measurements within Deep and Narrow Holes", IEEE Sensors J. 8 (2008) 1960-1967. 
• Erwin Peiner, Michael Balke, Lutz Doering, "Form Measurement Inside Fuel Injector Nozzle Spray Holes", Microelectron. J. 86 (2009) 984-986. 
• S. Fündling, S. F. Li, Ü. Sökmen, S. Merzsch, P. Hinze, T. Weimann, U. Jahn, A. Trampert, H. Riechert, E. Peiner, H.-H. Wehmann, A. Waag, "Three-dimensionally structured silicon as a substrate for the MOVPE growth of GaN nanoLEDs", phys. stat. sol. (a) 206 (2009) 1194-1198. 
• Uwe Brand , Vladimir Nesterov, Lutz Doering, Sebastian Bütefisch, Erwin Peiner, Stefanus Büttgenbach, Joachim Frühauf, "Neue taktile Sensoren für die Mikro- und Nanotechnik", Technisches Messen 76 (2009) 323-331. 
• Ü. Sökmen, A. Stranz, S. Fündling, H.-H. Wehmann, V. Bandalo, A. Bora, M. Tornow, A. Waag and E. Peiner, "Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures", J. Micromech. Microeng. 19 (2009) 105005 (8pp). 
• S. F. Li , S. Fündling, Ü. Sökmen, S. Merzsch, R. Neumann, P. Hinze, T. Weimann, U. Jahn, A. Trampert, H. Riechert, E. Peiner, H.-H. Wehmann, A. Waag, " GaN and LED structures grown on pre-patterned sili- con pillar arrays", Phys. Status Solidi C 1 4 (2009) / DOI 10.1002/pssc.200982608. 
• Erwin Peiner, Lutz Doering, "MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes", Microsyst. Technol. 16 (2010) 1259-1268, DOI: 10.1007/s00542-009-0951-x. 
• A. Stranz, Ü. Sökmen, H.-H. Wehmann, A. Waag, E. Peiner, "Fabrication and Characterization of Nanopillars for Silicon-Based Thermoelectrics", J. Electron. Mater. 39 (2010) 2013-2016, DOI: 10.1007/s11664-009-1015-9.
• Ü. Sökmen, A. Stranz., S. Fündling, S. Merzsch, R. Neumann, H.-H. Wehmann, E. Peiner, A. Waag, "Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process", Microsyst Technol 16 (2010) 863–870; DOI https://doi.org/10.1007/s00542-010-1035-7.
• U. Sökmen, A. Stranz, A. Waag, A. Ababneh, H. Seidel, U. Schmid, E. Peiner, "Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications", J. Micromech. Microeng. 20 (2010) 064007 (7pp).
• S. F. Li, S. Fündling, Ü. Sökmen, R. Neumann, S. Merzsch, P. Hinze, T. Weimann, U. Jahn, A. Trampert, H. Riechert, E. Peiner, H.-H. Wehmann, A. Waag, "GaN nanorods and LED Structures Grown on patterned Si and AlN/Si substrates by selective area growth", Phys. Status Solidi C 7 (2010) 2224–2226.
• A. Stranz, Ü. Sökmen, J. Kähler, A. Waag, E. Peiner, "Measurements of thermoelectric properties of silicon pillars," Sens. Act. 171 (2011) 48-53, doi:10.1016/j.sna.2011.01.022.
• Andrej Stranz, Andreas Waag, Erwin Peiner, "Thermal Characterization of Vertical Silicon Nanowires", J. Mater. Res. 26 (2011) 1958-1962, DOI: 10.1557/jmr.2011.60.
• J. Kähler, N. Heuck, A. Stranz, A. Waag, and E. Peiner, "Pick-and-Place Silver Sintering Die Attach of Small-Area Chips", IEEE Trans. Components, Packaging and Manufacturing Technol. 2 (2012) 199-207, DOI: 10.1109/TCPMT.2011.2170571.
• S. Merzsch, H. S. Wasisto, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner, "Cleaning of templates for nanoparticle collection by use of PDMS", Microsyst. Technol. 18 (2012) 835–842, DOI 10.1007/s00542-011-1379-7.
• J. Kähler, A. Stranz, A. Waag, and E. Peiner, "Packaging of MEMS and MOEMS for Harsh Environments", SPIE J. Micro/Nanolith. MEMS MOEMS 11 (2012) 021202, DOI:10.1117/1.JMM.11.2.021202.
• A. Stranz, J. Kähler, S. Merzsch, A. Waag, E. Peiner, "Nanowire silicon as a material for thermoelectric energy conversion", Microsyst. Technol. 18 (2012) 857–862. DOI: 10.1007/s00542-011-1390-z.
• Julian Kähler, Andrej Stranz, Lutz Doering, Stephan Merzsch, Nicolas Heuck, Andreas Waag, Erwin Peiner, "Fabrication, Packaging, and Characterization of p-SOI Wheatstone Bridges for Harsh Environments", Microsyst. Technol. 18 (2012) 869–878, DOI: 10.1007/s00542-011-1396-6.
• H. S. Wasisto, S. Merzsch, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner, "Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor", Microsyst. Technol. 18 (2012) 905–915, DOI: 10.1007/s00542-011-1405-9.
• J. Kähler, N. Heuck, A. Wagner, S. Stranz, E. Peiner, and A. Waag, "Sintering of Copper Particles for Die Attach", IEEE Trans. Components, Packaging and Manufacturing Technol. 2 (2012) 1587-1591, doi: 10.1109/TCPMT.2012.2201940.
• H. S. Wasisto, S. Merzsch, A. Waag, E. Uhde, T. Salthammer and E. Peiner, "Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever", Sens. Act. B 180 (2013) 77– 89, dx.doi.org/10.1016/j.snb.2012.04.003.
• H. S. Wasisto, S. Merzsch , A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner, "Portable cantilever-based airborne nanoparticle detector", Sens. Act. B 187 (2013) 118-127, doi:10.1016/j.snb.2012.09.074.
• Erwin Peiner and Lutz Doering, "Characterization of Diesel Injectors using Piezoresistive Sensors", IEEE Sensors J. 13 (2013) 701-708, DOI: 10.1109/JSEN.2012.2225614.
• H. S. Wasisto, S. Merzsch, A. Stranz, A. Waag, E. Uhde, T. Salthammer, and E. Peiner, "Evaluation of photoresist-based nanoparticle removal method for recycling silicon cantilever mass sensors", Sens. Act. A 202 (2013) 90– 99, dx.doi.org/10.1016/j.sna.2012.12.016.
• H. C. Qiu, P. Schwarz, D. Feili, S. Merzsch, E. Peiner, X. Z. Wu, H. Seidel, "Electrical performance analysis and characterization of two port piezoelectric resonators", Microsyst. Technol. 19 (2013) 1131–1136; DOI 10.1007/s00542-012-1710-y.
• A. Stranz, J. Kähler, A. Waag, E. Peiner, "Thermoelectric properties of high doped silicon from RT to 900K", J. Electron. Mater. 42 (2013) 2381-2387, DOI: 10.1007/s11664-013-2508-0.
• A. Stranz, A. Waag, E. Peiner, "High-temperature performance of stacked silicon nanowires for thermoelectric power generation", J. Electron. Mater. 42 (2013) 2233-2238, DOI: 10.1007/s11664-013-2590-3.
• H.S. Wasisto, S. Merzsch, A. Stranz, A. Waag, E. Uhde, T. Salthammer, E. Peiner, "Silicon resonant nanopillar sensors for airborne titanium dioxide engineered nanoparticle mass detection", Sens. Act. B 189 (2013) 146–156, dx.doi.org/10.1016/j.snb.2013.02.053.
• L. Dreher, C. Bihler, E. Peiner, A. Waag, W. Schoch, W. Limmer, S.T.B. Goennenwein, and M.S. Brandt, "Angle-Dependent Spin-Wave Resonance Spectroscopy of (Ga,Mn)As Films", Phys. Rev. B 87, 224422 (2013), DOI: 10.1103/PhysRevB.87.224422.
• H. S. Wasisto, S. Merzsch, A. Stranz, A. Waag, E. Uhde, T. Salthammer, E. Peiner, "Silicon Nanowire Resonators - Aerosol nanoparticle mass sensing in the workplace", IEEE Nanotechnology Magazine (June 2013) 18-23; DOI: 10.1109/MNANO.2013.2260462.
• H. S. Wasisto, S. Merzsch, A. Stranz, A. Waag, E. Uhde, T. Salthammer, E. Peiner, "Femtogram aerosol nanoparticle mass sensing utilizing vertical silicon nanowire resonators", Micro & Nano Lett. 8 (2013) 554–558; DOI: 10.1049/mnl.2013.0208.
• H. S. Wasisto, Qing Zhang, S. Merzsch, A. Waag, E. Peiner, "A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors", Microsyst. Technol. 20 (2014) 559–569, DOI: 10.1007/s00542-013-1991-9.
• H. S. Wasisto, Kai Huang, S. Merzsch, A. Stranz, A. Waag, E. Peiner, "Finite element modeling of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications", Microsyst. Technol. 20 (2014) 571–584; DOI: 10.1007/s00542-013-1992-8.
• S. Merzsch, F. Steib, H. S. Wasisto, A. Stranz, P. Hinze, T. Weimann., E. Peiner, A. Waag, "Production of vertical nanowire resonators by cryogenic-ICP-DRIE", Microsyst. Technol. 20 (2014) 759–767; DOI: 10.1007/s00542-013-2032-4.
• J. Kähler, A. Stranz, A. Waag, E. Peiner, "Thermoelectric Coolers with Silver-Sintered Interconnects", J. Electron. Mater. 43 (2014) 2397-2404; DOI: 10.1007/s11664-014-3078-5.
• H. S. Wasisto*, S. Merzsch, F. Steib, A. Waag, E. Peiner, “Vertical silicon nanowire array-patterned microcantilever resonators for enhanced detection of cigarette smoke aerosols”, Micro & Nano Lett. 9 (2014) 676–679; DOI: 10.1049/mnl.2014.0249.
• Li, Zhi;  Gao, Sai;  Pohlenz, Frank;  Brand, Uwe;  Koenders, Ludger;  Peiner, Erwin, “Determination of the Mechanical Properties of Nano-Pillars Using the Nanoindentation Technique”, Nanotechnology and Precision Engineering 12 (2014) 182-188; DOI: 10.13494/j.npe.20130018.
• H. S. Wasisto, S. Merzsch, E. Uhde, A. Waag, E. Peiner, "Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass  concentration monitoring", J. Sens. Sens. Syst. 4 (2015) 111–123; doi:10.5194/jsss-4-1-2015.
• H. S. Wasisto, S. Merzsch, E. Uhde, A. Waag, E. Peiner, "Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever", Microelectron. Eng. 145 (2015) 96–103; doi: 10.1016/j.mee.2015.03.037.
• A. Stranz, A. Waag, E. Peiner, "Investigation of thermoelectric parameters of Bi₂Te₃ - TEGs assembled using pressure-assisted silver powder sintering-based joining technology”, J. Electron. Mater. 44 (2015) 2055-2060; DOI: 10.1007/s11664-015-3655-2.
• H. S. Wasisto, E. Uhde, E. Peiner, "Enhanced performance of pocket-sized nanoparticle exposure monitor for healthy indoor environment“, Build. Environ. 95 (2016) 13-20; doi: 10.1016/j.buildenv.2015.09.013.
• G. Hamdana, H. S. Wasisto, L. Doering, C. Yan, L. Zhou, U. Brand, E. Peiner, "Double meander spring silicon piezoresistive sensors as micro force calibration standards", Opt. Eng. 55(9), 091409 (2016), doi:10.1117/1.OE.55.9.091409, open access.
• L. Doering, U. Brand, S. Bütefisch, T. Ahbe, T. Weimann, E. Peiner, T. Frank, "High-speed microprobe for roughness measurements in high-aspect-ratio microstructures", Meas. Sci. Technol. 28 (2017) 034009 (9pp); doi:10.1088/1361-6501/28/3/034009.
• F. Yu, S. Yao, F. Römer, B. Witzigmann, T. Schimpke, M. Strassburg, A. Bakin, H. Schumacher, E. Peiner, H. S. Wasisto, A. Waag, "GaN nanowire arrays with nonpolar sidewalls for vertically integrated field-effect transistors", Nanotechnology 28 (2017) 095206 (9pp); doi: 10.1088/1361-6528/aa57b6.
• G. Hamdana, M. Bertke, L. Doering, T. Frank, U. Brand, H. S. Wasisto, E. Peiner, "Transferable micromachined piezoresistive force sensor with integrated double-meander spring system", J. Sens. Sens. Syst. 6 (2017) 121–133, doi:10.5194/jsss-6-121-2017.
• G. Hamdana, L. Caccamo, M.  Bertke, T.  Südkamp, H. Bracht, H. S.  Wasisto, E. Peiner, "Enhanced colloidal lithography for fabrication of well-defined-area silicon nanowires", Microelectronic Engineering 179 (2017) 74-82; dx.doi.org/10.1016/j.mee.2017.04.030.
• M. Bertke, G. Hamdana, W. Wu, H. S. Wasisto, E. Uhde, E Peiner, "Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection", J. Micromech. Microeng. 27 (2017) 064001 (10pp); doi.org/10.1088/1361-6439/aa6b0d.
• T. Südkamp, G. Hamdana, M. Descoins, D. Mangelinck, H. S. Wasisto, E. Peiner, H. Bracht, “Self-diffusion in single crystalline silicon nanowires”, J. Appl. Phys. 123 (2018) 161515; doi: dx.doi.org/10.1063/1.4996987.
• D. Zillmann, A. Waag, E. Peiner, M.-H. Feyand, A. Wolyniec, "Thermoelectric and structural properties of large-scale produced Zr-/Hf-based half-Heusler compounds”, J. Electron. Mater. 47 (2018), 1546-1554; https://doi.org/10.1007/s11664-017-5917-7.
• J. Xu, M. Bertke, X. Li, H. Mu, H. Zhou, F. Yu, A. Schmidt, H. Bremers, E. Peiner, "Fabrication of ZnO Nanorods and Chitosan@ZnO Nanorods on MEMS Piezoresistive Self-Actuating Silicon Microcantilever for Humidity Sensing”, Sensors & Actuators: B. Chemical 273 (2018) 276–287; doi: 10.1016/j.snb.2018.06.017.
• M. Bertke, M. Fahrbach, G. Hamdana, J. Xu, H. S. Wasisto, E. Peiner, "Contact Resonance Spectroscopy for On-The-Machine Manufactory Monitoring”, Sens. Actuat. A 279 (2018) 501–508; doi: 10.1016/j.sna.2018.06.012.
• G. Hamdana, P. Puranto, J. Langfahl-Klabes, Z. Li, F. Pohlenz, Min Xu, T. Granz, M. Bertke, H. S. Wasisto, U. Brand, E. Peiner, “Determination of nanomechanical properties of crystalline silicon pillars by nanoindentation”, Sens. Actuat. A Phys. 283 (2018) 65–78; doi.org/10.1016/j.sna.2018.09.035.
• M. F. Fatahilah, P. Puranto, F. Yu, J. Langfahl-Klabes, A. Felgner, Z. Li, M. Xu, F. Pohlenz, T. Granz, K. Strempel, E. Peiner, U. Brand, A. Waag, H. S. Wasisto, “Traceable Nanomechanical Metrology of GaN Micropillar Array”, Adv. Eng. Mater. 20 (2018) 1800353; DOI: 10.1002/adem. 201800353.
• S. Mariana, G. Hamdana, J. Dickmann, M. Bertke, C. Michel, J. Meyer, N. Yulianto, G. Cagnoli, E. Peiner, A. Waag, M. Granata, S. Kroker, H. S. Wasisto, "Fabrication of SiO2 microcantilever arrays for mechanical loss measurements”, Materials Research Express 6 (2019) 045206; doi.org/10.1088/2053-1591/aafab7.
• A. Setiono, M. Fahrbach, M. Bertke, J. Xu, G. Hamdana, H. S. Wasisto, E. Peiner, “Phase optimization of thermally-actuated piezoresistive resonant MEMS cantilever sensors”, J. Sens. Sens. Syst. 8 (2019) 37–48; https://doi.org/10.5194/jsss-8-37-2019.
• A. Setiono, J. Xu, M. Bertke, W. O. Nyang’au, M. Fahrbach, H. S. Wasisto, E. Peiner, “Real-time frequency tracking of an electro-thermal resonant cantilever sensor with ZnO nanorods for chemical sensing”, Chemosensors 7 (2019) 2; doi:10.3390/chemosensors7010002.
• M. Bertke, J. Xu, M. Fahrbach, A. Setiono, H. S. Wasisto, E. Peiner, “Strategy toward miniaturized, self-out-readable resonant cantilever and integrated electrostatic microchannel separator for highly sensitive airborne nanoparticle detection”, Sensors 19 (2019) 901; doi:10.3390/s19040901.
• J. Toledo, V. Ruiz-Díez, M. Bertke, H. S. Wasisto, E. Peiner, J. L. Sánchez-Rojas, "Piezoelectric MEMS resonators for cigarette particle detection”, Micromachines 10 (2019) 145; https://doi.org/10.3390/mi10020145.
• J. K. Prüßing, G. Hamdana, D. Bougeard, E. Peiner, H. Bracht, “Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation”, J. Appl. Phys. 125 (2019) 085105; https://doi.org/10.1063/1.5066617.
• U. Brand, M. Xu, L. Doering, J. Langfahl-Klabes, H. Behle, S. Bütefisch, T. Ahbe, E. Peiner, T. Frank, B. Mickan, I. Kisilev, M. Hauptmannl, M. Drexel, “Long slender piezoresistive silicon microprobes for fast measurements of roughness and mechanical properties inside microholes with diameters below 100 µm”, Sensors 19 (2019) 1410; doi:10.3390/s19061410.
• J. Xu, M. Bertke, H. S. Wasisto, E. Peiner, Invited Topical Review: “Piezoresistive Microcantilevers for Humidity Sensing”,J. Micromech. Microeng. 29 (2019) 053003 (29pp), doi.org/10.1088/1361-6439/ab0cf5.
• Erwin Peiner und Hutomo Suryo Wasisto, "Editorial: Cantilever Sensors", Sensors 19 (2019) 2043; doi:10.3390/s19092043.
• Mariana, J. Gülink, G. Hamdana, F. Yu, K. Strempel, H. Spende, N. Yulianto, T. Granz, J. D. Prades, E. Peiner, A. Waag, H. S. Wasisto,“Vertical GaN Nanowires and Nanoscale Light-Emitting-Diode Arrays for Lighting and Sensing Applications”, ACS Applied Nano Materials 2 (2019) 4133-4142; doi: an-2019-00587v
• Dennis Zillmann, David Metz, Barbara Matheis, Andreas Dietzel, Andreas Waag, Erwin Peiner, “Thermoelectric generators fabricated from large-scale produced Zr-/Hf-based half-Heusler compounds using Ag sinter bonding”, J. Electron. Mater. 48 (2019) 5363-5374; https://doi.org/10.1007/s11664-019-07366-5.
• Zhi Li, Sai Gao, Uwe Brand, Karla Hiller, Susann Hahn, Gerry Hamdana, Erwin Peiner, Helmut Wolff, Detlef Bergmann, “Nanomechanical characterization of vertically aligned nanopillars using a MEMS-SPM nano-bending testing platform”, Sensors 19 (2019) 4529 (13pp); doi:10.3390/s19204529.
• Wilson Ombati Nyang’au, Andi Setiono, Maik Bertke, Harald Bosse, Erwin Peiner, “Cantilever-droplet-based sensing of magnetic particle concentrations in liquids”, Sensors 19 (2019) 4758 (18pp); doi:10.3390/s19214758.

• Andi Setiono, Wilson Ombati Nyang’au, Michael Fahrbach, Jiushuai Xu, Maik Bertke, Hutomo Suryo Wasisto, Erwin Peiner, “Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement”, J. Micromech. Microeng. 29 (2019) 124006 (12pp); doi.org/10.1088/1361-6439/ab4e29.

• Maik Bertke, Jiushuai Xu, Andi Setiono, Ina Kirsch, Erik Uhde, Erwin Peiner, "Fabrication of a micro-cantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection”, J. Micromech. Microeng. 30 (2020) 014001 (13pp); DOI: 10.1088/1361-6439/ab4e56.

• Andi Setiono, Maik Bertke, Wilson Ombati Nyang’au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner,  “In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection”, Sensors 20(3) (2020) 618 (18pp); https://doi.org/10.3390/s20030618.

• Jan K. Prüßing, Tim Böckendorf, Gerry Hamdana, Erwin Peiner, Hartmut Bracht, “Defect distribution in boron doped silicon nanostructures characterized by means of scanning spreading resistance microscopy”, J. Appl. Phys. 127 (2020) 055703; doi: 10.1063/1.5134558.

• Wilson Ombati Nyang’au, Andi Setiono, Angelika Schmidt, Harald Bosse, Erwin Peiner, "Sampling and Mass Detection of a Countable Number of Microparticles Using on-Cantilever Imprinting", Sensors 20(9) (2020) 2508; https://doi.org/10.3390/s20092508.

• Michael Fahrbach, Sebastian Friedrich, Brunero Cappella, Erwin Peiner, “Calibrating a high-speed contact-resonance profilometer”, J. Sens. Sens. Syst. 9 (2020) 179–187, https://doi.org/10.5194/jsss-9-179-2020.

• Min Xu, Zhi Li, Michael Fahrbach, Erwin Peiner, Uwe Brand, “Investigating the trackability of silicon microprobes in high-speed surface measurements”, Sensors 21 (2021) 1557 (13pp); doi: 10.3390/s21051557.

• Michael Fahrbach, Sebastian Backes, Heinrich Behle, Min, Xu, Brunero Cappella, Uwe Brand, Erwin Peiner,
  "Customized piezoresistive microprobes for combined imaging of topography and mechanical properties",
  Measurement: Sensors 15 (2021) 100042 , https://doi.org/10.1016/j.measen.2021.100042; data available.

• Maik Bertke, Ina Kirsch, Erik Uhde, Erwin Peiner,
  "Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel",
  Sensors 21 (2021) 3731 (19pp); doi: 10.3390/s21113731.
• Andi Setiono, Michael Fahrbach, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Iqbal Syamsu, Hutomo Suryo Wasisto, Erwin Peiner,
  "Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure",
  Sensors 21 (2021) 4088 (19pp); doi: 10.3390/s21124088.

Journal publications and research reports:

• E. Peiner, K. Kopitzki, "Ion Beam Mixing of Binary Metal Systems with Positive Heats of Mixing", Institut für Strahlen und Kernphysik der Universität Bonn, Annual Report (1985-1987)138,139.
• J. Meissner, K. Kopitzki, G. Mertler, E. Peiner, "Ion Beam Mixing of Selected Binary Metal Systems of Different Crystalline Structures", ibid. 140,141.
• M. Buchgeister, W. Hiller, K. Kopitzki, E. Peiner, "Ion BeamMixing of the Binary Systems Au-Ru and Au-W", ibid. 141-143.
• S. Sacré, K. Kopitzki, G. Mertler, E. Peiner, "Stability of Au₂₄Ru₇₆ metastable phases", ibid. 143.
• E. Peiner, R. Herwig, A. Schlachetzki, "Entwicklung eines Ätzverfahrens zur Erkennung von Versetzungen in Submikronbereichen an Indiumphosphid-Kristalloberflächen", Schlussbericht zum Forschungsvertrag mit der DBP Telekom (1991)
• H. Fritsch, R. Mikuta, P. Hauptmann, D. Scholz, E. Peiner, A.Schlachetzki, "Neuartige mikromechanische resonante Vibrationssensoren", Sensormagazin 1/96 (1996) 5,6.
• D. Scholz, E. Peiner, H. Fritsch, R. Mikuta, "Mikromechanische Vibrationssensoren für den Einsatz im Maschinenbau", Forschungsbericht 7/96, (Deutsche Forschungsgesellschaft für die Anwendung der Mikroelektronik e. V. (DFAM), Frankfurt/Main, 1996). 
• K. Fricke, E. Peiner, T. Iwert, R. Mikuta, "Maschinendiagnose-Sensorsystem (MDS2)", Forschungsbericht 11/98, (Deutsche Forschungsgesellschaft für die Anwendung der Mikroelektronik e. V. (DFAM), Frankfurt/Main, 1998). 
• Erwin Peiner, Lutz Doering, Vladimir Nesterov, "Tactile Probes for High Aspect Ratio Micrometrology", mstnews 02/2004 41,42. 
• Erwin Peiner, "Mikrotastsonden für die Erfassung geometrischer Merkmale in der Mikrosystemtechnik", ti Sensorik 2-2006 6.
• E. Peiner, "Winzlingen auf der Spur - Nanodetektoren sollen den Umgang mit Nanopartikeln sicherer machen", GIT Labor-Fachzeitschrift 11/2010 835.
• G. Palm, J. Kähler, A. Stranz, R. Neumann, N. Heuck, A. Bakin, E. Peiner, A. Waag, "Mikro-Nano-Integration unter Druck – Drucksintern als Lotersatz", PLUS 6/2010 1376-1382.
• Julian Kähler, Andreas Waag, and Erwin Peiner, "Sensors for data logging during deep drilling", SPIE Newsroom (2011), doi: 10.1117/2.1201105.003695.
• Hutomo Suryo Wasisto, Erik Uhde, Andreas Waag, and Erwin Peiner, "Sensor monitors exposure to airborne nanoparticles", SPIE Newsroom (2011), doi: 10.1117/2.1201105.003685.

Contributions to international scientific conferences with proceedings:

• D. Scholz, E. Peiner, J. Graßmann, A. Schlachetzki, L. Kempen, H. Neuhäuser, "A simple load-deflection technique for the determination of Young's modulus of thin films", Proc. Conf.Micro Materials (Micro Mat '95), edited by B. Michel and T. Winkler (Deutscher Verband für Materialforschung und -prüfung (DVM), Berlin, 1995), 557-562.
• E. Peiner, S. Mo, H. Iber, G.-P. Tang, A. Schlachetzki, "SEM-based characterization techniques for strongly mismatched heteroepitaxy", in: Heterostructure Epitaxy and Devices, edited by J. Novák and A. Schlachetzki, NATO ASI Series 3, Vol. 11 (Kluwer, Dordrecht, The Netherlands, 1996), 147-151.
• H.-H. Wehmann, A. Bartels, R. Klockenbrink, G.-P. Tang, E. Peiner,A. Schlachetzki, L. Malacky, "Properties of InGaAs-MSM-Photodetectors on Si", Proc. 8^th Intern.Conf. InP And Related Materials (IPRM '96), April 21-25, 1996, Schwäbisch Gmünd, (IEEE, Piscataway, NJ, 1996), 207-210.
• D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta, P.Hauptmann, "A smart resonant sensor fabricated by Si MST for online vibration control of rotating machinery", Proc. 26^th Europ. Solid State Dev. Res. Conf. (ESSDERC '96), Bologna,Italy, 9.-11. Sept. 1996, (G. Baccarani and M. Rudan, eds.),(Editions Frontières, Gif-sur-Yvette, France, 1996), 721-724.
• D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta, P.Hauptmann, "An Online Vibration-Control System for Rotating Machinery based on Smart Sensors Fabricated by Si MST", Proc. 5^th Intern. Conf. and Exhibition on Micro Electro, Opto, Mechanical Systems and Components (Micro System Technologies '96), Berlin,17.-19. Sept. 1996 (H. Reichl and A. Heuberger, eds.), (VDE-Verlag,Berlin, 1996), 157-162.
• D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta, P. Hauptmann, "A micromechanical vibration sensor based on the variation of power coupling between optical fibres", 2^nd Congress and Exhibition for Optical Sensor Technology, MeasuringTechniques and Electronics (OPTO '96), Leipzig, 25.-28. Sept.1996 (ACS Organisations GmbH, Wunstorf, 1996), 291-296.
• D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta, P. Hauptmann, "A micromechanical resonant sensor with optoelectronic read-out for vibration diagnosis of rotatingmachinery", Proc. 1^st Intern. Conf. on Advanced Semiconductor Devices and Microsystems (ASDAM '96), Smolenice Castle, Slovakia, 20.-24. Okt. 1996 (T. Lalinský, F. Dubecký, J.Osvald, Š. Hašík,eds.), 297-300.
• H. Fritsch, R. Mikuta, P. Hauptmann, D. Scholz, E. Peiner, A.Schlachetzki, "A low frequency micromechanical resonant vibration sensor for wear monitoring", Proc. 10^th Europ. Conf. Solid-St. Transducers (Eurosensors X), Leuven, Belgium, 8-11 September 1996, (R. Puers, ed.), (Catholic Univ.Leuven, Heverlee, Belgium, 1996), 1129-1132.
• K. Fricke, E. Peiner, D. Scholz, A. Schlachetzki, U. Harms, L.Kempen, H. Neuhäuser, "Bending stiffness and stress of thin films on silicon microcantilevers", Proc. Intern. Conf. Exhib. Micro Materials (Micro Mat '97), (B. Michel, T. Winkler, eds.), (Deutscher Verband für Materialforschung und -prüfung (DVM), Berlin, 1997), 1049-1051.
• E. Peiner, K. Fricke, A. Schlachetzki, P. Hauptmann, "Micromachined vibration sensor with on-chip circuitry and optical interconnects", Proc. 11^th Europ. Conf. Solid-St. Transducers (Eurosensors XI), Warsaw, Poland, September 21-24, 1997, (Warsaw University of Technology, Warsaw,1997), 293-296.
• E. Peiner, K. Fricke, S. Mo, D. Fehly, A. Schlachetzki,"Vibration sensor with optoelectronic interface", Proc. 27^th Europ. Solid State Dev. Res. Conf. (ESSDERC '97), Stuttgart, 22.-24. Sept., 1997, (Editions Frontières, Paris, 1997), 440-443.
• E. Peiner, D. Scholz, K. Fricke, A. Schlachetzki, "Static Testing of Microelectromechanical Sensors", in "Non-Linear Electromagnetic Systems", Studies in Applied Electromagnetics and Mechanics: Advanced Techniques and Mathematical Methods,Vol. 13 (IOS, Amsterdam, 1998), 253-256.
• E. Peiner, R. Mikuta, T. Iwert, H. Fritsch, P. Hauptmann, K. Fricke, A. Schlachetzki, "Micromachined Resonator for Cavitation Sensing", Proc. 12^th Europ. Conf. Solid-St. Transducers (Eurosensors XII), Southampton, UK, September 13-16, 1998, (IOP, Bristol, 1998), 897-900.
• K. Fricke, E. Peiner and A. Schlachetzki, "Fracture properties of epitaxial InP microcantilevers", Proc. 12^th Europ. Conf. Solid-St. Transducers (Eurosensors XII), (IOP, Bristol,1998), 723-726.
• R. V. Kusmenko, A. V. Gansha, E. P. Domashevskaya, J. Schreiber, S. Hildebrandt, S. Mo, E. Peiner, A. Schlachetzki, "Temperature dependence of residual stress in epitaxial layers of GaAs on (001)Si by means of photoreflectance spectroscopy (PR)", Abstr. 14^th International Vacuum Congress (IVC-14, EM.PWe35), Birmingham, 31.August - 4. September, 1998.
• K. Fricke, E. Peiner, I. Behrens, D. Fehly, A. Schlachetzki,"Hetero-Micromachining of Epitaxial III/V Compound Semiconductors", Proc. 13^th Europ. Conf. Solid-St.Transducers (Eurosensors XIII), The Hague, September 12-15, 1999, (Delft Univ. Technol., Delft, The Netherlands, 1999), 667-670.
• A. S. Bakin, D. Piester, I. Behrens, H.-H. Wehmann, D. Fehly, E.Peiner, A. A. Ivanov, A. Tamsir, A. Schlachetzki, H.-J. Rösler, "Novel approach to nanometer-scale patterning of siliconsubstrates", Abstr. MRS Spring Meeting, April 24-28, San Francisco, 2000, S. 190.
• I. Behrens, E. Peiner, K. Fricke, A. Bakin, A. Schlachetzki, "Spring-Mass Resonator with a Composite Beam Structure fabricated by Hetero-Micromachining", Proc. 14^th Europ. Conf. Solid-St. Transducers (Eurosensors XIV), Copenhagen, August 28-30, 2000, (MIC-Mikroelektronik Centret, Lyngby, 2000), 511-514.
• I. Behrens, E. Peiner, K. Fricke, A. Bakin, A. Schlachetzki,"Concept of a Gyroscope in Hetero-Micromachining", Proc.10^th Europ. Heterostructure Technol. Workshop & Europ. Seminar Adv. Heterostructure Technol. and Impact on Innovative Business, Ulm, 17.-19. Sept. 2000.
• I. Behrens, E. Peiner, A. Bakin, A. Schlachetzki, "Influence of Substrate Preparation on Fracture Properties of InP Cantilevers", Proc. 3^rd Intern. Conf. Advanced Semicond. Dev. Microsyst. (ASDAM 2000), (IEEE, Piscataway, NJ, 2000), 387-390.
• I. Behrens, E. Peiner, K. Fricke, A. Bakin, A. Schlachetzki, "Hetero-Micromachining of Epitaxial III/V Compound Semiconductors", in "Smart Materials, Proc. 1^st caesarium", (Springer, Berlin, 2001), 1-8.
• Ingo Behrens, Erwin Peiner, Andrey Bakin, Andreas Schlachetzki, "Micromachining of Silicon Carbide on Silicon Fabricated by Low Pressure Chemical Vapour Deposition", 12^th Micromech. Eur. Workshop (MME 2001), Cork, Ireland, Sept.16-18, 2001, (NMRC, Cork, 2001), 43-45.
• Erwin Peiner, Holger Fritsch, Thomas Iwert, "Condition Monitoring with Axle Box Bearings Using Microelectromechanical Vibration Sensors", 12^th Micromech. Eur. Workshop (MME 2001), Cork, Ireland, Sept. 16-18, 2001, (NMRC, Cork,2001), 293-296.
• A. Bakin, I. Behrens, A. Ivanov, E. Peiner, D. Piester, H.-H.Wehmann, A. Schlachetzki, "Growth of SiC on Si(100) by LPCVD and Patterning of the Grown Layers", Intern. Conf. Silicon Carbide Rel. Mater. (ICSCRM 2001), Tsukuba Intern. Congr. Cent. (Epochal Tsukuba), Tsukuba, Japan, Oct. 28-Nov. 2, 2001.
• E. Peiner, "Optical absorption by dislocations in strongly mismatched InP on silicon", Proc. 14^th Indium Phosphide And Related Materials Conf. (IPRM 2002), May 12-16, 2002, Stockholm, (IEEE, Piscataway, NJ, 2002), pp. 483-486.
• A. Guttzeit, E. Peiner, H.-H. Wehmann, "Effect of threading dislocations on optical absorption and electron scattering instrongly mismatched heteroepitaxial III-V compound semiconductors on silicon", NATO Adv. Res. Workshop on Extended Defects in Wide Gap Materials (EDWGM) and Intern. Conf. on Extended Defects in Semiconductors (EDS 2002), Bologna, Italy, June 1-6, 2002.
• I. Behrens, B. Herold, L. Doering, E. Peiner, "Piezoresistive Cantilever as Portable Micro Force Calibration Standard", 13^th Micromech. Eur. Workshop (MME '02), Sinaia, Oct. 6-8, 2002,(IMT-Bucharest, 2002), pp. 31-34.
• E. Peiner, I. Behrens, L. Doering, U. Brand, "Piezoresistive Cantilever for Microforce Calibration", Sensor 2003 Kongress -Vortrag Nr. A9.3, Nürnberg, 13.-15. Mai 2003.
• L. Doering, U. Brand, E. Peiner, J. Frühauf, E. Gärtner, "Development of micro force setting standards for stylus instruments", Proc. euspen Intern. Topic Conf. 2003, Aachen, 19.-20. Mai 2003.
• Lutz Doering, Erwin Peiner, Ingo Behrens, Uwe Brand, "Calibration of micro force setting standards using a new nano force calibration device", Proc. Micro System Technol. 2003, München, Oct. 7,8 (Francis, Poing, 2003), 492-494. 
• L. Doering, E. Peiner, V. Nesterov, U. Brand, "Low Noise Piezoresistive Micro Force Sensor", Proc. Nansoscale Calibration Standards and Methods: Dimensions and Related Measurements in the Micro-and Nanometer Range (NanoScale 2004), Braunschweig, Mar. 25,26 (Wiley-VCH, Weinheim, 2005), 157-170. 
• E. Peiner, L. Doering, "Force Calibration of Stylus Instruments using silicon microcantilevers", Techn. Dig. Eurosensors XVIII, Rome, Sept. 12-15, 2004, 220-223. 
• A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje, G. Ginev, T. Rabe, W. Limmer, "Transport and optical properties of a-C and a-C:H modification films", Test 2005, 3rd Intern. Conf. Mater. Testing, Nürnberg, 10.-12. Mai, 2005 (AMA, Wunstorf, 2005), 113-118. 
• E. Peiner, M. Oehler, S. Dreyer, C. Jooss, A. C. Mofor, A. H. El-Shaer, A. Waag, L. Doering "Piezoresistive Cantilever Magnetic Field Sensor", Sensor 2005, 12th Intern. Conf. Nürnberg, 10.-12. Mai, 2005 (AMA, Wunstorf, 2005) 213-218. 
• A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje, T. Rabe, "Transport and optical pro- perties of amorphous carbon and hydrogenated amorphous carbon films", 13th Intern. Congr. Thin Films / 8th Intern. Conf. Atomic. Contr. Surf. Interf. Nanostr. (ICTF 13/ACSIN 8), Stock- holm, 19-23 June, 2005, p. 83. 
• E. Peiner, A. Tibrewala, R. Bandorf, S. Biehl, H. Lüthje, L. Doering, "Micro force sensor with piezoresistive amorphous carbon strain gauge", 13th Intern. Conf. Solid-State Sens., Actuat. Microsyst. (Transducers'05), Seoul, June 5-9, 2005, 551-554. 
• H. Lüthje, S. Biehl, R. Bandorf, J.-H. Sick, E. Peiner, A. Tibrewala, "Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon", 13th Intern. Conf. Solid-State Sens., Actuat. Microsyst. (Transducers'05), Seoul, June 5-9, 2005, 2111-2114. 
• A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje, "Piezoresistive co-efficient of diamond-like carbon films", MicroMechanics Europe 2005 (MME 05), Göteborg, 4-6 Sept., 2005, 191-194. 
• M. Balke, E. Peiner, L. Doering, "Tactile probes for micro metrology", Joint Intern. IMEKO TC1+TC7 Symp., Sept. 21-24, Ilmenau, 2005, 85-88. 
• H.-H. Wehmann, B. Postels, M. Kreye, A. Che Mofor, A. Bakin, K. Aljasem, E. Peiner, R. Kling, F. Reus, C. Kirchner, M. Albrecht, H. Ahlers, D. Fuhrmann, J. Bläsing, A. Waag, "ZnO- Nanostrukturen - Herstellung und zukünftige Anwendungen", 1st Leibniz-Conf. Adv. Sci. - Nanoscience 2005, Lichtenwalde, 6.-8. Okt., 2005. 
• V. Nesterov, L. Doering, U. Brand, E. Peiner, S. Büttgenbach, "Modelling and investigation of the temperature drift of tactile piezoresistive silicon force- and deflection nanosensors", Mikrosystemtechnik-Kongress 2005, Freiburg, 10.-12.Okt., 2005, (VDE, Berlin, 2005), 81-84. 
• E. Peiner, A. Tibrewala, H. Lüthje, R. Bandorf, S. Biehl, L. Doering, "MEMS-Kraftsensoren mit integrierten Dehnungsmessstreifen aus diamantartigem Kohlenstoff", 13. ITG-/GMA Fachtagung Sensoren und Messsysteme 2006, Freiburg, 13./14. März 2006, (VDE, Berlin, 2006), 85-88. 
• E. Peiner, A. Tibrewala, H. Lüthje, R. Bandorf, S. Biehl, L. Doering, "Piezoresistive diamond-like carbon strain gauges for silicon MEMS", Materials Congress 2006 - Diamond, London, April 5,6, 2006. 
• A. Tibrewala, E. Peiner, R. Bandorf, H. Lüthje, S. Biehl, L. Doering, "Properties of sputtered amorphous carbon for micro strain gauges", Materials Congress 2006 - Diamond, London, April 5,6, 2006. 
• M. Kreye, B. Postels, K. Aljasem, H.-H. Wehmann, E. Peiner, A. Waag, "Advanced Chemical Bath Deposition and Application of ZnO Nanostructures on Various Substrate Materials, 2006 MRS Spring Meeting, San Francisco, April 17-21, 2006. 
• A. Christ, V. Dyachenko, G. Isenberg, L. Doering, E. Peiner, "Cardiomyocytes: glass pipettes of calibrated stiffness can measure apparent elastic moduli", Acta Physiologica 2006, Vol. 186, Suppl. 650, PW02P-10. 
• H. Lüthje, R. Bandorf, S. Biehl, J.-H. Sick, E. Peiner, A. Tibrewala, "Investigations of the Piezoresistive Properties of Nano Structured Amorphous Carbon for Sensor Applications", Techn. Proc. of the 2006 NSTI Nanotechnology Conf. and Trade Show, Vol. 1 (Nanotech 2006) Boston, May 7-11, 2006, pp. 800-803. 
• Michael Balke, Erwin Peiner, Lutz Doering, "Cantilever structures for measuring microstructured surfaces of macro and micro components ", XVIII IMEKO World Congress - Metrology for a Sustainable Development, Rio de Janeiro, September 17-22, 2006. 
• E. Peiner, A. Tibrewala, H. Lüthje, R. Bandorf, S. Biehl, L. Doering, "Piezoresistive diamond-like carbon micro strain gauges", XVIII IMEKO World Congress - Metrology for a Sustainable Development, Rio de Janeiro, September 17-22, 2006. 
• Erwin Peiner, Lutz Doering, Uwe Brand, Andreas Christ, Gerrit Isenberg, Michal Balke, "Force calibration of micro pipettes for single-cell probing", XVIII IMEKO World Congress - Metrology for a Sustainable Development, Rio de Janeiro, September 17-22, 2006. 
• Lutz Doering, Uwe Brand, Michal Balke, Erwin Peiner, "Calibration of low-force stylus probes", XVIII IMEKO World Congress - Metrology for a Sustainable Development, Rio de Janeiro, September 17-22, 2006. 
• Erwin Peiner, Arti Tibrewala, Ralf Bandorf, Holger Lüthje, Lutz Doering, "Diamond-like Carbon for MEMS", Proc. MicroMechanics Europe 2006 (MME 06), Southampton, 3-5 Sept., 2006, pp. 137-140. 
• A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje, "Longitudinal and Transversal Piezoresistive Effect in a-C:H films", Proc. MicroMechanics Europe 2006 (MME 06), Southampton, 3-5 Sept., 2006, pp.185-188. 
• R. Bandorf, H. Lüthje, S. Biehl, J.-H. Sick, E. Peiner, A. Tibrewala, "Piezoresistive Properties of Nanocomposite Amorphous Carbon Films", International Meeting on Developments in Materials, Processes and Applications of Nanotechnology MPA 2007, Poster 078, Belfast, Jan 13-15, 2007. 
• Erwin Peiner, Michael Balke, Lutz Doering, Uwe Brand, "Tactile Probes for Dimensional Metrology with Micro Components at Nano Resolution", 10th CIRP Conference on Computer Aided Tolerancing Specification and Verification for Assemblies (21.-23.03.2007, Erlangen). In: Weckenmann, A. (Hrsg.): Book of Abstracts * Berichte aus dem Lehrstuhl Qualitätsmanagement und Fertigungsmesstechnik der Universität Erlangen-Nürnberg; Band 16, Aachen: Shaker, 2007, p. 27 and CD-ROM. ISBN 978-83222-6036-1 
• Erwin Peiner, Arti Tibrewala, Ralf Bandorf, Saskia Biehl, Holger Lüthje, Lutz Doering, "Mechanical and piezoresistive properties of diamond-like carbon for MEMS", Proc. Intern. Conf. Smart Syst. Int. 2007, Paris, March 28./29., 2007 (VDE-Verlag, Berlin, 2007), pp. 257-264. 
• Erwin Peiner, Lutz Doering, Michael Balke, "Traceable metrology with micro components at nano resolution using cantilever probes", Proc. Intern. Conf. Smart Syst. Int. 2007, Paris, March 28./29., 2007 (VDE-Verlag, Berlin, 2007), pp. 577-580. 
• M. Balke, E. Peiner, L. Doering, "Tactile probing device for high aspect ratio structures", Proc. Intern. Conf. Smart Syst. Int. 2007, Paris, March 28./29., 2007 (VDE-Verlag, Berlin, 2007), pp. 419-421. 
• M. Balke, E. Peiner, L. Doering, "New micromachined sensor system for tactile measurements of high-aspect ratio microstructures", SPIE Conf. "Microtechnologies for the New Millennium 2007", Maspalomas, Gran Canaria, May 2-4, 2007, Proc. SPIE Vol. 6589, 65890J (May. 15, 2007). 
• E. Peiner, L. Doering, M. Balke, A. Christ, "Silicon cantilever sensor for micro-/nanoscale dimension and force metrology", SPIE Conf. "Microtechnologies for the New Millennium 2007", Maspalomas, Gran Canaria, May 2-4, 2007, Proc. SPIE Vol. 6589, 65890M (May, 15, 2007). 
• Arti Tibrewala, Anurak Phataralaoha, Erwin Peiner, Ralf Bandorf, Stephanus Büttgenbach, "Piezoresistive effect in DLC Films and Silicon", Techn. Proc. of the 2007 NSTI Nanotechnology Conf. and Trade Show, Vol. 3 (Nanotech 2007), Santa Clara, CA, May 20-24, pp. 17-20.
• E. Peiner, M. Balke, L. Doering, "Micro-/Nanoscale Dimension and Force Metrology Using Silicon Cantilever Probes", Proc. SENSOR Cof. 2007, 13th Intern. Conf., Nürnberg, May 22- 24, 2007, Vol. I, (AMA, Wunstorf, 2007, ISBN 978-3-9810993-1-7), A3.2, pp. 81-86. 
• E. Peiner, M. Balke, L. Doering, U. Brand, H. Bartuch, S. Völlmeke, "Fabrication and test of piezoresistive cantilever sensors for high-aspect-ratio micro metrology" Mikrosystemtechnik Kongress 2007, 15. - 17. Oktober, Dresden, 2007, (VDE-Verlag, Berlin-Offenbach, 2007), pp. 857-860. 
• Erwin Peiner, Lutz Doering, Michael Balke, "Slender Tactile Sensor for High-Aspect-Ratio Micro Metrology", Proc. IEEE Sensors 2007, Oct., 28-31, Atlanta, USA, 2007, pp.760-763. 
• Michael Balke, Erwin Peiner, Lutz Doering, "A Micromachined Sensor System with Integrated Probing Tip for Tactile Measurements of High Aspect Ratio Microstructures", Proc. Micromechanics & Microengineering Europe 2007 (MME 07), Guimaraes, 16-18 Sept., 2007 (Univ. Minho, Guimaraes, 2007), ISBN 978-972-98603-3-1, pp. 265-268. 
• E. Peiner, M. Balke, L. Doering, "Taktile Sensoren für Kontur- und Rauheitsmessungen an Mikrosystemen und -komponenten mit Nanometerauflösung", 14. GMA/ITG-Fachtagung "Sensoren und Messsysteme 2008", 11. und 12. März 2008, Ludwigsburg, VDI-Ber. 2011, S. 169-178,Best Paper Award. 
• José Luis Sánchez-Rojas, J. Hernando, J. Vázquez, Ü. Sökmen, E. Peiner, A. Ababneh and U. Schmid, "Nanoelectromechanical characterization of piezoelectric microcantilevers", Intern. congr. & exhib. nanobiotechnology (Nanobioeurope2008), June 09-13, 2008, Barcelona. 
• U. Sökmen, E. Peiner, A. Waag, A. Ababneh, H. Seidel, U. Schmid, "Dry Etching of Sputter-Deposited AlN-Thin Films for the Realization of Piezoelectric MEMS", Proc. 19th MicroMecha- nics Europe Workshop, (MME 08), September 28-30, 2008, Aachen. 
• U. Sökmen, M. Balke, A. Stranz, E. Peiner, S. Fündling, H.-H. Wehmann, A. Waag, "Optimization of ICP Deep Cryogenic Dry Etching of Silicon", Proc. 19th MicroMechanics Europe Workshop, (MME 08), September 28-30, 2008, Aachen. 
• Erwin Peiner, Michael Balke, Lutz Doering, "Form Measurement Inside Fuel Injector Nozzle Spray Holes", Proc. 34th Intern. Conf. Micro&Nano Engineering (MNE 2008), 15-18 September 2008, Athen, NMT-P09. 
• Sönke Fündling, Shunfeng Li, Ünsal Sökmen, Peter Hinze, Thomas Weimann, Uwe Jahn, Achim Trampert, Henning Riechert, Erwin Peiner, Hergo-Heinrich Wehmann, Andreas Waag, "3D Structured Silicon as a Substrate for the MOVPE Growth of GaN NanoLEDs", Intern. Workshop Nitride Semicond. (IWN 2008), Oct. 6-10, 2008, Montreux (invited). 
• Shunfeng Li, Sönke Fündling, Ünsal Sökmen, Erwin Peiner, Hergo-Heinrich Wehmann, An- dreas Waag, Peter Hinze, Thomas Weimann, Uwe Jahn, Achim Trampert, Henning Riechert, "Growth of GaN NanoLED structures on 3D patterned Silicon substrates by MOVPE", 3rd Intern. Workshop Nanowire Growth Mechanisms, 15.-16.09. 2008, Duisburg. 
• A. Stranz, Ü. Sökmen, E. Peiner, A. Waag, "Sapphire on silicon assembly using a nanostructured compliant interface", Techn. Dig. 22nd Intern. Conf. Eurosensors XXII, 7.-10.9. 2008, Dresden. 
• Ü. Sökmen, E. Peiner, A. Waag, A. Ababneh, H. Seidel, U. Schmid, "ICP Cryogenic Dry Etching of AlN Thin Films Deposited Freestanding Silicon Cantilevers for the Realisation of a Resonator for Mass Sensing", Proc. Intern. Conf. Smart Syst. Int. 2009, Bruxelles, March 10./11., 2009, CD-ROM, (AKA, Heidelberg, 2009) ISBN 978-3-89838-616-6.
• Erwin Peiner, Lutz Doering, "MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes", Proc. Intern. Conf. Design, Technol., Integr., Packaging of MEMS/MOEMS (DITP 2009), Rome, 1-3 April 2009 (EDA Publishing/DTIP 2009, ISBN: 978-2-35500-009-6), pp. 369-374. 
• A. Ababneh, G. Marchand, H. Seidel, J. Hernando, J.L. Sánchez-Rojas, Ü. Sökmen, E. Pei- ner, U. Schmid, "Comparison Between AlN Thin Films with Different Crystal Orientation for MEMS Applications", Proc. SPIE Conf. "Microtechnologies for the New Millennium 2008", Vol. 7362, Dresden, 4 - 6 May 2009. 
• Ü. Sökmen, M. Balke, A. Stranz, S. Fündling, E. Peiner, H.-H. Wehmann, A. Waag, "ICP Cryogenic Dry Etching for Shallow and Deep Etching in Silicon", SPIE Conf. "Microtechnologies for the New Millennium 2008", Vol. 7362, Dresden, 4 - 6 May 2009. 
• Jorge Hernando, José L. Sánchez-Rojas, Helmut Seidel, Abdallah Ababneh, Ünsal Sökmen, Erwin Peiner, Ulrich Schmid, "Characterization and simulation of resonantly driven beams excited by high quality AlN thin films", SPIE Conf. "Microtechnologies for the New Millennium 2008", Vol. 7362, Dresden, 4 - 6 May 2009; DOI: https://doi.org/10.1117/12.821636. 
• Sönke Fündling, Shunfeng Li, Ünsal Sökmen, Stephan Merzsch, Richard Neumann, Erwin Peiner, Hergo-Heinrich Wehmann, Andreas Waag, Peter Hinze, Thomas Weimann, Uwe Jahn, Achim Trampert, Henning Riechert, "MOVPE Grown GaN Structures on Silicon Pillar Arrays", Ext. Abstr. EW-MOVPE XIII, Ulm, 7-10. June 2009, S. 159-162 
• S.F. Li, S. Fündling, Ü. Sökmen, S. Merzsch, R. Neumann, J. Ledig, P. Hinze, T. Weimann, U. Jahn, A. Trampert, H. Riechert, E. Peiner, H.-H. Wehmann, A. Waag, "GaN Nanorods on Deep Etched Silicon for Solid State Lighting", SPIE Symp. on SPIE Optical Engin. + Appl., "Ninth Internat. Conf. on Solid State Lighting", San Diego, California, USA, 2-6 August 2009 (invited). 
• E. Peiner, L. Doering, A. Stranz, "Tactile Metrology for High-Aspect-Ratio Micro Bores", Mikrosystemtechnik-Kongress 2009, 12. - 14. Oktober, Berlin, 2009, (VDE-Verlag, Berlin-Offenbach, 2009). 
• H. Bartuch, S. Völlmeke, L. Doering, U. Brand, E. Peiner, "Wafer Scale Fabrication of Piezoresistive Cantilever Sensors", Mikrosystemtechnik-Kongress 2009, 12. - 14. Oktober, Berlin, 2009, (VDE-Verlag, Berlin-Offenbach, 2009). 
• A. Stranz, Ü. Sökmen, A. Waag, E. Peiner, "Fabrication and Characterization of Nanopillars for Silicon-based Thermoelectrics", 28th Intern. Conf. Thermoelectrics and 7th Europ. Conf. Thermoelectrics, Freiburg, July 26 - 30, 2009. 
• Ünsal Sökmen, Andrej Stranz, Andreas Waag, Abdallah Ababneh, Helmut Seidel, Ulrich Schmid, Erwin Peiner, "Realization of AlN Sputter-Deposited Silicon Cantilever Resonators for Mass Sensing", Proc. Micromechanics & Microengineering Europe 2009 (MME 09), Toulouse, 20-22 Sept., 2009. 
• Shunfeng Li, Sönke Fündling, Ünsal Sökmen, Richard Neumann, Stephan Merzsch1, Johannes Ledig, Peter Hinze, Thomas Weimann, Uwe Jahn, Achim Trampert, Henning Riechert, Erwin Peiner, Hergo-Heinrich Wehmann, Andreas Waag, "GaN Nanorods and LED Structures Grown on Patterned Si and AlN/Si Substrates by Selective Area Growth", Intern. Conf. Nitride Semicond., 2009, ICC Jeju, Jeju, Korea, October 18-23. 
• Richard Neumann, Sönke Fündling, Shunfeng Li, Ünsal Sökmen, Stephan Merzsch, Andrej Stranz, Hergo-Heinrich Wehmann, Erwin Peiner, Andreas Waag, "Planarisation, Contacting and Electrical Characterisation of Nanoscale GaN LEDs Grown on Silicon", Intern. Conf. Nitride Semicond., 2009, ICC Jeju, Jeju, Korea, October 18-23. 
• S. Völlmeke, H. Bartuch, E. Peiner, K. Semmler, R. Röder, A. Steinke, "Fabrikation hochstabiler Mikrotaster zur Analyse von Mikrobohrungen", 15. ITG-/GMA-Fachtagung Sensoren und Messysteme 18./19.5.2010 Nürnberg. 
• Erwin Peiner, Lutz Doering, Andrej Stranz, "Surface finish improvement of deep micro bores monitored using an active MEMS cantilever probe", Intern. Conf. Industrial Technol. (IEEE- ICIT 2010), Viña del Mar - Valparaíso, Chile, 14 -17 March 2010.
• J. Kähler, A. Stranz, G. Palm, A. Waag, E. Peiner, "Hochtemperaturtaugliche Chip-SubstratKontaktierung opto-elektronischer Bauelemente mittels Nanotechnologie-Verbindungstechnik (NTV)", 2. GMM Workshop "Mikro-Nano-Integration", Erfurt, 3./4. März 2010, ISBN 978-3-8007-3216-6, (VDE, Berlin, 2010) 9-13.
• Ü. Sökmen, A. Waag, E. Peiner, A. Ababneh, H. Seidel, U. Schmid, "AlN Sputter-Deposited Silicon Cantilever Resonators for Mass Sensing Fabricated Using ICP-DRIE", 2. GMM Workshop "Mikro-Nano-Integration", Erfurt, 3./4. März 2010, ISBN 978-3-8007-3216-6, (VDE, Berlin, 2010) 45-48.
• A. Stranz, Ü. Sökmen, E. Peiner, A. Waag, "Messung von thermoelektrischen Eigenschaften an Silizium-basierten Nanosäulen", 2. GMM Workshop "Mikro-Nano-Integration", Erfurt, 3./4. März 2010, ISBN 978-3-8007-3216-6, (VDE, Berlin, 2010) 116-119.
• J. Kähler, A. Stranz, G. Palm, A. Waag, E. Peiner, "Mikro-Nano-Silberpulver für die Chip-Substrat-Kontaktierung mittels Drucksintern", 2. GMM-Workshop "Technologien und Werkstoffe der Mikrosystem- und Nanotechnologie", Darmstadt, 10./11. Mai 2010, ISBN 978-3-8007-3253-1, (VDE, Berlin, 2010) 104-108.
• Ü. Sökmen, S. Fündling, A. Stranz, S. Merzsch, R. Neumann, S.F. Li, H.-H. Wehmann, E. Peiner and A. Waag, "Anwendung des ICP-DRIE-Kryotrockenätzprozesses für anisotrope Strukturen in Silizium", 2. GMM-Workshop "Technologien und Werkstoffe der Mikrosystem- und Nanotechnologie", Darmstadt, 10./11. Mai 2010, ISBN 978-3-8007-3253-1, (VDE, Berlin, 2010) 9-13.
• A. Stranz, Ü. Sökmen, J. Kähler, E. Peiner, A. Waag, "Measurements of thermoelectric properties of silicon pillars",  E-MRS Spring Meeting, Symposium A: From embedded sensors to sensorial materials, Strasbourg, June 7-11, 2010.
• Julian Kähler, Andrej Stranz, Nicolas Heuck, Gerhard Palm, Andreas Waag, Erwin Peiner, "Die-Attach for High-Temperature Applications using Fineplacer- Pressure- Sintering (FPS)", Proc. 3rd Electronics System-Integration Technology Conference ESTC2010, 13.-16. Sept. Berlin, 2010, pp. 1-5; DOI: 10.1109/ESTC.2010.5642808.
• Shunfeng Li, Soenke Fuendling, Xue Wang, Jiandong Wei, Stephan Merzsch, Mohamed M.–A. Suleiman, Uensal Soekmen, Erwin Peiner, Hergo -H Wehmann, Andreas Waag, Werner Bergbauer, Martin Strassburg, "Selective area growth of GaN nanorods by metalorganic vapor phase epitaxy: dependence on growth conditions and polarity",  Intern. Workshop  Nitride Semicond. (IWN-2010), Tampa, Florida, 19.-24. Sept. 2010.
• T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, Ü. Sökmen, E. Peiner, U. Schmid, J. Sánchez-Rojas, "Quality Factor Enhancement in AlN-Actuated MEMS by Velocity Feedback Loop", Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria, Proc. Eng. 5 (2010) 1494-1497.
• Erwin Peiner and Lutz Doering, "Characterization of Diesel Injectors using Piezoresistive Sensors", Proc. IEEE Sensors 2010 Conference, Waikoloa, Hawaii, 01.- 04. Nov. 2010, pp. 2083-2087.
• S. Merzsch, H. S. Wasisto, Ü. Sökmen, A. Waag, E. Uhde, T. Salthammer, and E. Peiner, "Mass Measurement of Nanoscale Aerosol Particles using a Piezoelectrically Aactuated Resonant Sensor", IEEE Sensors 2010 Conference, Waikoloa, Hawaii, 01.- 04. Nov. 2010, Open Poster B2P-Q9. 
• S. Merzsch, H. S. Wasisto, A. Waag, I.Kirsch, E. Uhde, T. Salthammer, E. Peiner, "Cleaning of templates for nanoparticle collection by use of PDMS", Smart Sensors, Actuators and MEMS (EMT101) in SPIE International Symposium on Microtechnologies, Prag, 18 - 20 April 2011, Proc. SPIE 8068, 806819 (2011); doi:10.1117/12.886352.
• A. Stranz, J. Kähler, A. Waag, E. Peiner, "Nanostructured silicon for thermoelectric", Smart Sensors, Actuators and MEMS (EMT101) in SPIE International Symposium on Microtechnologies, Prag, 18 - 20 April 2011, Proc. SPIE 8066, 80662I (2011); doi:10.1117/12.886841.
• Julian Kähler, Lutz Döring, Stephan Merzsch, Andrej Stranz, Andreas Waag, Erwin Peiner, "Design and Fabrication of Piezoresistive p-SOI Wheatstone Bridges for High-Temperature Applications", Smart Sensors, Actuators and MEMS (EMT101) in SPIE International Symposium on Microtechnologies, Prag, 18 - 20 April 2011, Proc. SPIE 8066, 806603 (2011); doi:10.1117/12.886855.
• H. S. Wasisto, S. Merzsch, A. Stranz, A. Waag, I. Kirsch, E. Uhde, T. Salthammer and E. Peiner, "Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticles mass", Smart Sensors, Actuators and MEMS (EMT101) in SPIE International Symposium on Microtechnologies, Prag, 18 - 20 April 2011, Proc. SPIE 8066, 806623 (2011); doi:10.1117/12.886622.
• H. S. Wasisto, S. Merzsch, A. Stranz, A. Waag, I. Kirsch, E. Uhde, T. Salthammer and E. Peiner, "A resonant cantilever sensor for monitoring airborne nanoparticles", Proc. 16th Intern. Conf. Solid-State Sens. Actuat. Microsyst. (Transducers'11), June 5-9, 2011, Beijing, pp. 1116 - 1119, DOI: 10.1109/TRANSDUCERS.2011.5969233.
• Erik Uhde, Ina Kirsch, Hutomo Suryo Wasisto, Stephan Merzsch, Andreas Waag, Erwin Peiner, "Direct mass determination of ultrafine aerosols using a micro-scale sensor", The 12th Intern. Conf. Indoor Air Quality and Climate (Indoor Air 2010), June 5-10, Austin.
• H. S. Wasisto, L. Doering, J. Kaehler, S. Merzsch, A. Waag and E. Peiner, "Design and Modeling of Thermally Excited Microcantilever Sensors for Airborne Nanoparticles Mass Detection", Mikrosystemtechnik-Kongress 2011, 10. - 12. Oktober 2011, Darmstadt, (VDE-Verlag, Berlin-Offenbach, 2011, ISBN  978-3-8007-3367-5), pp. 863-866.
• J. Kaehler, S. Merzsch, A. Stranz, A. Waag und E. Peiner, "Herstellung und AVT von hochtemperaturtauglichen piezoresistiven Wheatstone-Brücken für Sensorik in rauen Umgebungen", Mikrosystemtechnik-Kongress 2011, 10. - 12. Oktober 2010, Darmstadt, (VDE-Verlag, Berlin-Offenbach, 2011, ISBN  978-3-8007-3367-5), pp. 261-264.
• A. Stranz, J. Kähler, A. Waag, E. Peiner, "Messung der thermoelektrischen Eigenschaften von Silizium-Nanosäulen", Mikrosystemtechnik-Kongress 2011, 10. - 12. Oktober 2011, Darmstadt, (VDE-Verlag, Berlin-Offenbach, 2011, ISBN  978-3-8007-3367-5), pp. 693-696.
• S. Merzsch, H. S. Wasisto, A. Waag und E. Peiner, "Membran- und Cantileverherstellung mittels ICP Kryo-Tiefenätzverfahren aus Silizium Bulk Material", Mikrosystemtechnik-Kongress 2011, 10. - 12. Oktober 2010, Darmstadt, (VDE-Verlag, Berlin-Offenbach, 2011, ISBN  978-3-8007-3367-5), pp. 527-530.
• A. Stranz, J. Kähler, A. Waag, E. Peiner, "High-temperature thermoelectric properties of silicon nanopillars", Europ. Congr. Exhibit. Advan. Mater. Processes (Euromat 2011), Montpellier, France, September 12th-15th, 2011.
• Julian Kähler, Nicolas Heuck, Gerhard Palm, Andrej Stranz, Andreas Waag, Erwin Peiner, "Low-Pressure Sintering of Silver Micro- and Nanoparticles for a High Temperature Stable Pick & Place Die Attach", Proc. 18th European Microelectronics and Packaging Conf. (EMPC-2011), Brighton, UK, 12-15 Sept. 2011, pp. 1 - 7.
• H. S. Wasisto, S. Merzsch, A. Waag, I. Kirsch, E. Uhde, T. Salthammer and E. Peiner, "Enhanced Airborne Nanoparticles Mass Sensing using a High-Mode Resonant Silicon Cantilever Sensor", IEEE Sensors 2011 Conf., Limerick, Ireland, 28-31 Oct, pp. 736 - 739, DOI: 10.1109/ICSENS.2011.6127053.
• H. S. Wasisto, L. Doering, S. Merzsch, A. Waag and E. Peiner, "Self-Exciting and Self-Sensing Resonant Cantilever Sensor for Improved Monitoring of Airborne Nanoparticles Exposure", IEEE Sensors 2011 Conf., Limerick, Ireland, 28-31 Oct, pp. 728 - 731, DOI: 10.1109/ICSENS.2011.6127061.
• S. Merzsch, H. S. Wasisto, A. Waag, I.Kirsch, E. Uhde, T. Salthammer, E. Peiner, "Low-weight electrostatic sampler for airborne nanoparticles", IEEE Sensors 2011 Conf., Limerick, Ireland, 28-31 Oct, pp. 1177 - 1180, DOI: 10.1109/ICSENS.2011.6127335.
• J. Kähler, A. Stranz, A. Waag, E. Peiner, S. Jung, T. Kruspe, "Sinter-Attach of Peltier Dice for Cooling of Deep-Drilling Electronics", 2012 IEEE Intern. Instrum. Meas. Technol. Conf. - Smart Measurements for a Sustainable Environment, (I2MTC), May 13-16, 2012, Graz, pp. 658 - 663; DOI: 10.1109/I2MTC.2012.6229481.
• H. S. Wasisto, S. Merzsch , A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner, "Silicon Cantilever Resonators Integrated with Portable Electrostatic Samplers for Sensing and Characterizing Engineered Nanoparticles in Workplace Air", Proc. 14th International Meeting on Chemical Sensors (IMCS 12), Nürnberg, May 20 - 23, 2012, pp. 221-224, DOI 10.5162/IMCS2012/2.4.5.
• S. Merzsch, H. S. Wasisto, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner, "Recycling of cantilevers for nanoparticle detection by lift-off technique", Proc. 14th International Meeting on Chemical Sensors (IMCS 12), Nürnberg, May 20 - 23, 2012, pp. 916-919, DOI 10.5162/IMCS2012/P1.2.10.
• E. Uhde, I. Kirsch, S. Merzsch, H. S. Wasisto, E. Peiner, "Development of a personal sampler for airborne ultrafine particles using a MEMS microbalance sensor", Proc. 10th Intern. Conf. on Healthy Buildings 2012; Brisbane, QLD; Australia; July 8 - 12, 2012; Code 98750; Vol. 3, 2012, pp. 2446-2447.
• A. Stranz, J. Kähler, A. Waag, E. Peiner, "Thermoelectric properties of high doped silicon from RT to 900K", ICT/ECT Joint Conference 2012, July 9-12, 2012, Aalborg, Denmark.
• A. Stranz, A. Waag, E. Peiner, "High-temperature performance of stacked nanowire silicon for thermoelectric power generation", Proc. ICT/ECT Joint Conference 2012, July 9-12, 2012, Aalborg, Denmark.
• S. Merzsch, H.S. Wasisto, E. Peiner, I.Kirsch and E. Uhde, "A MEMS sensor based personal sampler for ultrafine particles", European Aerosol Conference (EAC 2012), 2-7 Sept. 2012, Granada, Spain; www.eac2012.com/EAC2012Book/4.html.
• H. S. Wasisto, S. Merzsch , A. Waag, E. Uhde, I. Kirsch and E. Peiner, "Selective electrostatic deposition of airborne engineered nanoparticles on a patterned substrate of silicon cantilever sensor", European Aerosol Conference (EAC 2012), 2-7 Sept. 2012, Granada, Spain; www.eac2012.com/EAC2012Book/6.html.
• J. Kähler, A. Stranz, E. Peiner, A. Waag, "Sinter-Attach of High-Temperature Sensors for Deep-Drilling Monitoring", 13th Intern. Conf. Electronic Packaging Technology & High Density Packaging (ICEPT-HDP 2012), August 13-16, 2012, Guilin, China, pp. 1594 - 1599; DOI: 10.1109/ICEPT-HDP.2012.6474912.
• H. S. Wasisto, S. Merzsch, A. Stranz, A. Waag, E. Uhde, T. Salthammer, and E. Peiner, "Femtogram Mass Measurement of Airborne Engineered Nanoparticles Using Silicon Nanopillar Resonators", 26th European Conf. Solid-State Transducers (Eurosensors 2012), September 9-12, 2012, Krakow, Poland, Proc. Eng. 47 (2012) 289-292, doi: 10.1016/j.proeng.2012.09.140. (2nd Young Scientists Best Poster Award).
• H. S. Wasisto, S. Merzsch, I. Kirsch, A. Waag, E. Uhde, T. Salthammer, and E. Peiner, "Effect of Photoresist Coating on the Reusable Resonant Cantilever Sensors for Assessing Exposure to Airborne Nanoparticles", 26th European Conf. Solid-State Transducers (Eurosensors 2012), September 9-12, 2012, Krakow, Poland Proc. Eng. 47 (2012) 302-305, doi: 10.1016/j.proeng.2012.09.143.
• S. Merzsch, J. Kähler, H.S. Wasisto, L. Doering, U. Brand, E. Peiner, A. Waag, "Silicon based sensors and functional components fabricated by ICP-RIE cryogenic dry etching", Proc. 23rd Micromechanics and Microsystems Europe Workshop (MME 2012), September 9-12, 2012, Ilmenau, Germany, pp. 12-15.
• H. S. Wasisto, S. Merzsch, A. Stranz, A. Waag, E. Uhde, T. Salthammer, E. Peiner, "Silicon Nanowire Resonators for Aerosol Nanoparticle Mass Sensing", Proc. 8th Ann. IEEE Intern. Conf. Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2013), Suzhou, China, April 7-10, 2013, pp. 506-509; doi: 10.1109/NEMS.2013.6559781. (Best Conference Paper Award).
• Hartmut A. Bracht, Soizic Eon, Rafael Frieling, Daniel Issenmann, Anton Plech, Erwin Peiner, John Lundsgaard Hansen, Arne Nylandsted Larsen, Joel W. Ager, Eugene E. Haller, "Isotope Defect Engineering of Silicon for Thermoelectric Applications", 2013 MRS Spring Meeting, San Francisco, April 1-5, 2013.
• H. S. Wasisto, Q. Zhang, S. Merzsch, A. Waag, and E. Peiner, "A closed-loop system for frequency tracking of piezoresistive cantilever sensors", Smart Sensors, Actuators and MEMS in SPIE Intern. Symp. Microtechnologies, Grenoble, 24 - 26 April 2013, Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876337 (May 17, 2013); doi:10.1117/12.2017009.
• H. S. Wasisto, S. Merzsch, A. Waag, and E. Peiner, "MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing", Smart Sensors, Actuators and MEMS in SPIE Intern. Symp. Microtechnologies, Grenoble, 24 - 26 April 2013, Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632L (May 17, 2013); doi:10.1117/12.2016938.
• H. S. Wasisto, S. Merzsch, K. Huang, A. Stranz, A. Waag, and E. Peiner, "Simulation and characterization of silicon nanopillar-based nanoparticle sensors", Smart Sensors, Actuators and MEMS in SPIE Intern. Symp. Microtechnologies, Grenoble, 24 - 26 April 2013, Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876321 (May 17, 2013); doi:10.1117/12.2016970.
• S. Merzsch, H. S. Wasisto, A. Stranz, P. Hinze, T. Weimann, E. Peiner, and A. Waag, "Fabrication of vertical nanowire resonators for aerosol exposure assessment", Smart Sensors, Actuators and MEMS in SPIE Intern. Symp. Microtechnologies, Grenoble, 24 - 26 April 2013, Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630V (May 17, 2013); doi:10.1117/12.2016932.
• S. Merzsch, T. Salthammer, H. S. Wasisto, I. Kirsch, E. Uhde, A. Waag, and E. Peiner, "A personal sampler for direct mass determination of nano-particles using a resonant cantilever sensor", Proc. TechConnect World 2013 - Nanotech, Microtech, Biotech, Cleantech Joint 2013 Conferences, May 12-16, 2013, National Harbor, Maryland.
• S. Merzsch, T. Salthammer, H.S. Wasisto, I. Kirsch, E. Uhde, A. Waag, E. Peiner,  "A personal sampler for direct mass determination of nano-particles using a resonant cantilever sensor"; Proc. 2013 NSTI Nanotechnol. Conf. and Expo, NSTI-Nanotech 2013, Vol. 2, pp. 123-126; ISBN: 978-1-4822-0584-8; www.nsti.org/procs/Nanotech2013v2/3/T6.155.
• S. Merzsch, H. S. Wasisto, I. Kirsch, A. Waag, E. Peiner, E. Uhde, "Personal monitor for engineered nanoparticles using a MEMS cantilever balance"; European Aerosol Conference (EAC 2013), 1.-5. Sept. 2013, Prag, eac2013.cz.
• J. Kähler, A. Stranz, A. Waag, E. Peiner, "Thermoelectric Coolers with Silver-Sintered Interconnects", 11th Europ. Conf. Thermoelectrics (ECT 2013), 18-20 November 2013, ESA/ESTEC, Noordwijk, The Netherlands.
• H. S. Wasisto, S. Merzsch, F. Steib, A. Waag, E. Peiner, "In-Plane-Excited Silicon Nanowire Arrays-Patterned Cantilever Sensors for Enhanced Airborne Particulate Matter Exposure Detection", Proc. 9th Ann. IEEE Intern. Conf. Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2014), Waikiki Beach, Hawaii, 13.-16. April 2014.
• S. Merzsch, H. S. Wasisto, I. Kirsch, E. Peiner, and E. Uhde, "An integrated Personal Monitor for Engineered Nanoparticles", The 13th Intern. Conf. Indoor Air Quality and Climate (Indoor Air 2014), July 7-12, 2014, Hong Kong, China.
• H. S. Wasisto, S. Merzsch, E. Uhde, T. Salthammer, A. Waag, E. Peiner, "Handheld Micromechanical Cantilever Mass Sensor for Early Detection of Carbon Nanoparticles", 17. ITG/GMA-Fachtagung "Sensoren und Messsysteme 2014", 3. - 4. Juni 2014, Nürnberg, (VDE, Berlin, 2014), ITG-Fachbericht Band 250, ISBN 978-3-8007-3622-5.
• H. S. Wasisto, S. Merzsch, F. Steib, E. Uhde, A. Waag, E. Peiner, "Surface-Enhanced Silicon Resonant Cantilever Sensors with Vertical Nanowires", 17. ITG/GMA-Fachtagung "Sensoren und Messsysteme 2014", 3. - 4. Juni 2014, Nürnberg, ITG-Fachbericht Band 250, (VDE, Berlin, 2014), ISBN 978-3-8007-3622-5.
• A. Stranz, A. Waag, E. Peiner, “Investigation of thermoelectric parameters of Bi2Te3 - TEGs assembled using pressure-assisted silver-sintering-based joining technology”, Intern. Conf. Thermoelectrics (ICT 2014 ), Nashville, Tennessee, USA, July 6-10, 2014.
• H. S. Wasisto, A. Waag, S. Merzsch, E. Uhde, E. Peiner, "Cantilever Micro Balance as Nanoparticle Exposure Monitor", 25th Micromechanics and Microsystems Europe workshop (MME 2014), August 31-September 3, 2014, Istanbul, Turkey.
• Julian Kähler, Andrej Stranz, Andreas Waag, Erwin Peiner, “Pressure-Assisted Sintering Die-Attach for High-Temperature Electronics”, International Conference for Advanced Drilling Technology, 15 - 16 September 2014, Congress Union Celle (Celle Drilling 2014).
• H. S. Wasisto, S. Merzsch, E. Uhde, A. Waag, E. Peiner, "Fully Integrated Personal Airborne Nanoparticle Detector Based on Microelectromechanical Resonant Cantilever", Proc. 40th Int'l Micro and Nano Engineering Conference (MNE 2014), Lausanne, Switzerland, September 22-26, p. 565.
• Stranz, A.; Waag, A.; Peiner, E, “Untersuchung der thermoelektrischen Eigenschaften von Submikrometer-Silizium-Säulen”, 5. GMM-Workshop 8. bis 9. Oktober 2014 in Ilmenau, GMM-Fachbericht Band 81, (VDE, Berlin, 2014), ISBN 978-3-8007-3632-4.
• H. S. Wasisto, F. Yu, L. Doering, S. Völlmeke, U. Brand, A. Bakin, A. Waag, E. Peiner „Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices“, Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951723 (May 21, 2015); doi:10.1117/12.2179866.
• H. S. Wasisto, L. Doering, A. Daus, U. Brand, T. Frank, E. Peiner, “Development of silicon microforce sensors integrated with double meander springs for standard hardness test instruments”, Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171X (May 21, 2015); doi:10.1117/12.2180117.
• H. S. Wasisto, W. Wu, E. Uhde, A. Waag, E. Peiner, “Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure”, Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170B (May 21, 2015); doi:10.1117/12.2180151.
• U. Brand, S. Gao, L. Doering, Z. Li, M. Xu, S. Buetefisch, E. Peiner, J. Fruehauf, K. Hiller, „Smart sensors and calibration standards for high precision metrology", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170V (May 21, 2015); doi:10.1117/12.2179455.
• H. S. Wasisto, F. Yu, L. Doering, S. Völlmeke, M. Ali Deeb, U. Brand, A. Bakin, A. Waag, E. Peiner, “Silicon probing tips coated with protective aluminium oxide thin films for fast tactile cantilever sensors”, AMA Conferences 2015 – SENSOR 2015 and IRS2 2015, pp. 575-579, DOI 10.5162/sensor2015/D4.3.
• H.S. Wasisto, W. Wu, S. Merzsch, E. Uhde, A. Waag, E. Peiner, “Low-Cost Wearable Cantilever-Based Nanoparticle Sensor Microsystem for Personal Health and Safety Monitoring”, Proc. 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015, June 21-25, 2015, Anchorage, Alaska, pp. 428-431; DOI: 10.1109/TRANSDUCERS.2015.7180952.
• H.S. Wasisto, L. Doering, U. Brand, E. Peiner, “Ultra-High-Speed Cantilever Tactile Probe for High-Aspect-Ratio Micrometrology”,Proc. 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015, June 21-25, 2015, Anchorage, Alaska, pp. 1061-1064; DOI:10.1109/TRANSDUCERS.2015.7181109.
• H. S. Wasisto, R. Dang, L. Doering, U. Brand, E. Peiner, “Microtactile cantilever resonators for characterizing surface deposits“ Proc. Eurosensors 2015, Freiburg, Germany, September 6 to 9, 2015; Proc. Eng. 120 (2015) 861–864, doi: 10.1016/j.proeng.2015.08.734.
• H. S. Wasisto, R. Dang, L. Doering, U Brand, E. Peiner, “Charakterisierung von Oberflächenablagerungen mit einem Mikro-Biegebalken-Tastsensor im Kontakt-Resonanzmodus”, Proc. Mikrosystemtechnik-Kongress 2015, 26.-28. Oktober 2015, Karlsruhe (VDE-Verlag, Berlin-Offenbach, ISBN 978-3-8007-4100-7).
• C. Yan, L. Zhou, H. S. Wasisto, L. Doering, U. Brand, T. Frank, E. Peiner, „Silizium-Mikro-Kraftnormal”, 18. GMA/ITG Fachtagung Sensoren und Messsysteme 2016, 10. und 11. Mai 2016, Nürnberg, (AMA Service GmbH, Wunstorf, 2016), S. 162-167; DOI 10.5162/sensoren2016/3.1.4.
• M. Bertke, G. Hamdana, W. Wu, M. Marks, H. S. Wasisto, E. Peiner, "Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors”, Proc. MME 2016; J. Phys.: Conf. Ser. 757 (2016) 012006; doi:10.1088/1742-6596/757/1/012006.
• J. Yang, J. Xu, W. Wu, M. Bertke, H. S. Wasisto, E. Peiner, "Piezoresistive silicon cantilever covered by ZnO nanorods for humidity sensing", Eurosensors 2016, Budapest, Hungary, Proc. Eng. 168 (2016) 1114 – 1117; doi:10.1016/j.proeng.2016.11.361.
• S. Zhang, Y. Ding, W. Wu, M. Bertke, H. S. Wasisto, L. Doering, U. Brand, E. Peiner, "Direct-reading resonant silicon cantilever for probing of surface deposits", Eurosensors 2016, Budapest, Hungary, Proc. Eng. 168 (2016) 658 – 661; doi:10.1016/j.proeng.2016.11.241.
• M. Bertke, G. Hamdana, W. Wu, M. Marks, H. S. Wasisto, E. Peiner, "Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection“, Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460K (June 2, 2017); doi:10.1117/12.2266084; dx.doi.org/10.1117/12.2266084.
• J. Xu, M. Bertke, A. Gad, H. Zhou, H. S. Wasisto, E. Peiner, "Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever“, Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII, 102460C (June 13, 2017); doi:10.1117/12.2264897.
• G. Hamdana, M. Bertke, T. Südkamp, H. Bracht, H. S. Wasisto, E. Peiner, „Large-area fabrication of silicon nanostructures by templated nanoparticle arrays”, Proc. SPIE 10248, Nanotechnology VIII, 1024808 (May 30, 2017); doi:10.1117/12.2264995.
• M. Bertke, W. Wu, H. S. Wasisto, E. Uhde, E. Peiner, “Size-Selective Electrostatic Sampling and Removal of Nanoparticles on Silicon Cantilever Sensors for Air-Quality Monitoring”, 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Kaohsiung, Taiwan, June, 18 – 22, 2017, pp. 1493-1496; DOI: 10.1109/TRANSDUCERS.2017.7994342.
• G. Hamdana, T. Granz, M. Bertke, Z. Li, P. Puranto, U. Brand, H. S. Wasisto, E. Peiner, “Nanomechanical traceable metrology of vertically aligned silicon and germanium nanowires by nanoindentation”, 31^th European Conf. Solid-State Transducers (Eurosensors 2017), Paris, France, Sept., 3-6; Proceedings 1 (2017) 375; doi:10.3390/proceedings1040375; (Best poster award).
• T. Granz, S. Mariana, G. Hamdana, F. Yu, M. F. Fatahilah, I. M. Clavero, P. Puranto, Z. Li, U. Brand, D. Prades, E. Peiner, A. Waag, H. S. Wasisto, “Nanofabrication of vertically aligned 3D GaN nanowire arrays with sub-50 nm feature sizes using nanosphere lift-off lithography”, 31^th European Conf. Solid-State Transducers (Eurosensors 2017), Paris, France, Sept., 3-6; Proceedings 1 (2017) 309; doi:10.3390/proceedings1040309.
• J. Xu, M. Bertke, A. Gad, F. Yu , G. Hamdana, A. Bakin, E. Peiner, Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring, 31^th European Conf. Solid-State Transducers (Eurosensors 2017), Paris, France, Sept., 3-6; Proceedings 1 (2017) 290; doi:10.3390/proceedings1040290.
• M. Bertke, U. Wobeto Reinheimer, M. Fahrbach, G. Hamdana, H. S. Wasisto, E. Peiner, “Piezoresistive contact resonance spectroscopy for material and layer analysis of high-aspect-ratio microarchitectures”, 31^th European Conf. Solid-State Transducers (Eurosensors 2017), Paris, France, Sept., 3-6; Proceedings 1 (2017) 371; doi:10.3390/proceedings1040371.
• J. Xu, M. Bertke, X. Li, H. Mu, F. Yu, A. Schmidt, A. Bakin, E. Peiner, "Self-Actuating and Self-Sensing ZNO Nanorods/Chitosan coated Piezoresistive Silicon Microcantilever for Humidity Sensing”,31^st IEEE Conference on Micro Electro Mechanical Systems (MEMS 2018), 21 - 25 January 2018, Belfast, Northern Ireland, UK, DOI: 10.1109/MEMSYS.2018.8346520.
• M. Bertke, M. Fahrbach, G. Hamdana, H. S. Wasisto, E. Peiner, "Large Area Contact Resonance Spectroscopy Mapping System for On-The-Machine Measurements”, 31^st IEEE Conference on Micro Electro Mechanical Systems (MEMS 2018), 21 - 25 January 2018, Belfast, Northern Ireland, UK; DOI: 10.1109/MEMSYS.2018.8346701.
• A. Setiono, M. Fahrbach, M. Bertke, J. Xu, G. Hamdana, H. S. Wasisto, E. Peiner, “Phase characteristic optimization of resonant MEMS environmental sensors”, 19. ITG/GMA-Fachtagung „Sensoren und Messsysteme 2018”, 26.-27. Juni 2018, Kongresszentrum Nürnberg (VDE VERLAG GMBH, Berlin, Offenbach, 2018); pp. 80-83, ISBN: 978-3-8007-4683-5; ieeexplore.ieee.org/document/8436151/.
• J. Xu, K. Strempel, H. Zhou, A. Waag, M. Bertke, A. Schmidt, E. Peiner, “Area-Selective Growth of Aligned ZnO Nanorod Arrays for MEMS Device Applications”, 32th European Conf. Solid-State Transducers (Eurosensors 2018), Granz, Österreich, Sept., 9-12; Proceedings 2018, 2(13), 887; doi:10.3390/proceedings2130887.
• J. Xu, M. Bertke, C. Deng, M. Fahrbach, A. Schmidt, E. Peiner. “Silicon microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing”, 32th European Conf. Solid-State Transducers (Eurosensors 2018), Granz, Österreich, Sept., 9-12; Proceedings 2018, 2(13), 838; doi:10.3390/proceedings2130838.
• M. Fahrbach, L. Krieg, T. Voss, M. Bertke, J. Xu, E. Peiner, “Optimizing a cantilever measurement system towards high speed, nonreactive contact-resonance-profilometry”, 32th European Conf. Solid-State Transducers (Eurosensors 2018), Granz, Österreich, Sept., 9-12; Proceedings 2018, 2, 889; doi:10.3390/proceedings2130889.
• M. Bertke, J. Xu, G. Hamdana, H. S. Wasisto, E. Peiner, “Design of self-out-readable nano/micro-wire resonator for high sensitive airborne nanoparticle detection”, 32th European Conf. Solid-State Transducers (Eurosensors 2018), Granz, Österreich, Sept., 9-12; Proceedings 2018, 2, 879; doi:10.3390/proceedings2130879.
• T. Granz, J. S. Böke, G. Hamdana, M. Martens, A. Misra, S. Preußler, M. Schilling, E. Peiner, T. Schneider, A. Waag, H. S. Wasisto, “Nanofabrication of SOI-based photonic waveguide resonators for gravimetric molecule detection”, 32th European Conf. Solid-State Transducers (Eurosensors 2018), Granz, Österreich, Sept., 9-12; Proceedings 2018, 2, 1055; doi:10.3390/proceedings2131055.
• T. Granz, M. Temming, J. Xu, Qomaruddin, C. Fàbrega, N. Majid, G. Lilienkamp, W. Daum, E. Peiner, J. D. Prades, A. Waag, H. S. Wasisto, “UV-LED photo-activated room temperature NO₂ sensors based on nanostructured ZnO/AlN thin films”, 32th European Conf. Solid-State Transducers (Eurosensors 2018), Granz, Österreich, Sept., 9-12; Proceedings 2018, 2, 888; doi:10.3390/proceedings2130888.
• U. Brand, Z. Li, R. Popadic, K. Hiller, S. Hahn, T. Frank, G. Hamdana, E. Peiner, E. Gärtner, J. Frühauf, V. Nesterov, “Small Force Metrology for AFM, Stylus Instruments, CMM and Nanoindenter”, 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018), 8-13 July 2018, Paris, France; DOI: 10.1109/CPEM.2018.8500987.
• J. Xu, M. Bertke, A. Setiono, A. Schmidt, E. Peiner, “ZnO Nanostructures functionalized Piezoresistive Silicon Microcantilever Platform for Portable Gas Sensing”, IEEE MEMS 2019, Seoul, KOREA, 27 - 31 January, 2019, pp. 456-459; DOI: 10.1109/MEMSYS.2019.8870852.
• Wilson Ombati Nyang’au, Andi Setiono, Maik Bertke, Prabowo Puranto, Hutomo Suryo Wasisto, Thilo Viereck, Harald Bosse, Erwin Peiner, “Droplet –based evaporative approach for determining the mass of magnetic particles”, 20. ITG/GMA-Fachtagung „Sensoren und Messsysteme 2019”, 25.-26. Juni 2019, Kongresszentrum Nürnberg, (AMA Service GmbH, Wunstorf, 2019); DOI: 10.5162/sensoren2019/3.2.1.
• Michael Fahrbach, Erwin Peiner, “Entwicklung eines taktilen Mikrotaster-Messystems für Hochgeschwindigkeitsmessung von Form, Rauheit und mechanischen Eigenschaften”, 20. ITG/GMA-Fachtagung „Sensoren und Messsysteme 2019”, 25.-26. Juni 2019, Kongresszentrum Nürnberg, (AMA Service GmbH, Wunstorf, 2019); DOI: 10.5162/sensoren2019/P2.10.
• Andi Setiono, Jiushuai Xu, Michael Fahrbach, Maik Bertke, Wilson Ombati Nyangau, Hutomo Suryo Wasisto, Erwin Peiner, “Enhancement of real-time resonance tracking in electro-thermally actuated cantilever sensor with optimized phase characteristic”, J. Phys.: Conf. Ser. 1319 (2019) 012003 (7pp); doi:10.1088/1742-6596/1319/1/012003. 
• Prabowo Puranto, Gerry Hamdana, Frank Pohlenz, Jannick Langfahl-Klabes, Lars Daul, Zhi Li, Hutomo Suryo Wasisto, Erwin Peiner and Uwe Brand, “Indentation modulus and hardness investigation of crystalline silicon surfaces treated by inductively coupled plasma reactive ion etching”, J. Phys.: Conf. Ser. 1319 (2019) 012008 (6pp); doi:10.1088/1742-6596/1319/1/012008.
• W. O. Nyang’au, G. Hamdana, A. Setiono, M. Bertke, J. Xu, M. Fahrbach, P. Puranto, H. S. Wasisto and E. Peiner, “Adsorption and detection of mass of microparticles using silicon microcantilever”, J. Phys.: Conf. Ser. 1319 (2019) 012010 (7pp); doi:10.1088/1742-6596/1319/1/012010.
• Iqbal Syamsu, Tony Granz, Gregor Scholz, Shinta Mariana, Nursidik Yulianto, Lars Daul, Ludger Koenders, Joan Daniel Prades, Erwin Peiner, Andreas Waag, Hutomo Suryo Wasisto, “Design and fabrication of AlN-on-Si chirped surface acoustic wave resonator for label-free cell detection”, J. Phys.: Conf. Ser. 1319 (2019) 012011 (6pp); doi:10.1088/1742-6596/1319/1/012011.
• Maik Bertke, Jiushuai Xu, Andi Setiono, Gerry Hamdana, Hutomo Suryo Wasisto, Erwin Peiner, “Self-reading femtogram microbalance for highly sensitive airborne nanoparticle detection”, J. Phys.: Conf. Ser. 1319 (2019) 012004 (6pp); doi:10.1088/1742-6596/1319/1/012004.
• J. Xu, M. Bertke, A. Setiono, K. Strempel, N. Markiewicz, A. Schmidt, A. Waag, J. D. Prades, E. Peiner, “Piezoresistive Microcantilevers 3D-patterned using ZNO-Nanorods@Silicon-Nanopillars for Room-Temperature Ethanol Detection”, 20^th Intern. Conf. Solid-State Sensors, Actuators and Microsystems (Transducers 2019), Berlin, 23 - 27 June 2019, DOI: 10.1109/TRANSDUCERS.2019.8808821.
• J. Xu, M. Bertke, S. Bornemann, S. Mariana, C. Fan, A. Schmidt, H. S. Wasisto, A. Waag, E. Peiner, “Silicon Nanopillars with ZnO Nanorods by Nanosphere Lithography on a Piezoresistive Microcantilever, 20^th Intern. Conf. Solid-State Sensors, Actuators and Microsystems (Transducers 2019), Berlin, 23 - 27 June 2019; DOI: 10.1109/TRANSDUCERS.2019.8808435. 
• N. Markiewicz, O. Casals, J. Xu, M. F. Fatahilah, A. Schmidt, H. S. Wasisto, E. Peiner, A. Waag, J. D Prades, “Ultra Low Power Mass-Producible Gas Sensor based on Efficient Self-Heated GaN Nanorods”, 20^th Intern. Conf. Solid-State Sensors, Actuators and Microsystems (Transducers 2019), Berlin, 23 - 27 June 2019, DOI: 10.1109/TRANSDUCERS.2019.8808234.
• Nicolai Markiewicz, Olga Casals, Jiushuai Xu, Muhammad Fahlesa Fatahilah, Angelika Schmidt, Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, Joan Daniel Prades, “Efficient Self-Heating in Gallium Nitride Nanopillars for Ultra-Low-Power Mass-Producible Gas Sensors”, Proc. 2019 IEEE International Symposium on Olfaction and Electronic Nose (ISOEN), Fukuoka, Japan, 26-29 May 2019; DOI: 10.1109/ISOEN.2019.8823455.
• Maik Bertke, Jiushuai Xu, Andi Setiono, Erwin Peiner, Ina Kirsch, Erik Uhde, "Piezoresistive Microcantilever for Gravimetric Particulate Matter Monitoring”, Proc. MikroSystemTechnik Kongress 2019, 28.-30. Oktober 2019, Berlin, (VDE-Verlag, Berlin 2019); ISBN: 978-3-8007-5090-0, https://ieeexplore.ieee.org/abstract/document/9012771.

• Andi Setiono, Wilson Ombati Nyang’au, Michael Fahrbach, Jiushuai Xu, Maik Bertke, Hutomo Suryo Wasisto, Erwin Peiner, “Enhancement of unsteady frequency responses of electro-thermal resonance MEMS cantilever sensors”, J. Phys.: Conf. Ser. 1837 (2021) 012003; doi: 10.1088/1742-6596/1837/1/012003

• Prabowo Puranto, Qiang Zhang, Wilson O. Nyang’au, Jannick Langfahl-Klabes, Jan Thiesler, Mutaib Zackaria, Zhi Li, Hutomo S. Wasisto, Erwin Peiner, Uwe Brand, "Influence of eccentric nanoindentation on top surface of silicon micropillar arrays”, J. Phys.: Conf. Ser. 1837 (2021) 012008; doi: 10.1088/1742-6596/1837/1/012008

• Jiushuai Xu and Erwin Peiner, "Micromachined Silicon Cantilever Resonator-Based Humidity Sensors for Multifunctional Applications”, The 37th IEEE Intern. Conf. Micro Electro Mechanical Systems (MEMS 2021), 25-29 January, DOI: 10.1109/MEMS51782.2021.9375323.

• M. Fahrbach, M. Xu, U. Brand und E. Peiner, “Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip”, SMSI 2021 Conference – Sensor and Measurement Science International, pp. 73 – 74; DOI 10.5162/SMSI2021/A5.4; https://www.ama-science.org/proceedings/details/3948.

• M. Fahrbach, W. O. Nyang’au, O. Domanov, C. H. Schwalb, M. Xu, Z. Li, C. Kuhlmann, U. Brand und E. Peiner, “Gedämpfte Silizium Mikrotaster für Hochgeschwindigkeits-Rauheitsmessungen, Damped silicon micro probes for high-speed roughness measurements”, Proc. MikroSystemTechnik Kongress 2021, 8.-10. November 2021, Stuttgart-Ludwigsburg, (VDE-Verlag, Berlin 2021); ISBN: 978-3-8007-5656-8; https://ieeexplore.ieee.org/abstract/document/9698292

• Michael Fahrbach, Jiushuai Xu, Petr Klapetek, Jan Martinek, Erwin Peiner, "Contact Resonance Imaging with Vertical Nanowire Arrays", Sensoren und Messsysteme 2022 ∙ 10. – 11.05.2022, Nürnberg, (VDE-Verlag, Berlin, Offenbach, 2022), pp. 245 - 250, ISBN 978-3-8007-5835-7 245.

Contributions to national scientific conferences:

• R. Mikuta, P. Hauptmann, H. Fritsch, D. Scholz, E. Peiner, A.Schlachetzki, L. Kempen, H. Neuhäuser, "Strukturenmikromechanischer Vibrationssensoren auf der Basis des Resonanzeffekts für die Anwendung im Maschinen- und Anlagenbau", Tagungsband der Fachtagung"Sensoren-Aktoren-Bussysteme" Magdeburg, 23.-24. März1995, 152-158.
• L. Kempen, H. Neuhäuser, J. Graßmann, D. Scholz, E. Peiner, A. Schlachetzki, "Charakterisierung beschichteter Siliziumzungen durch Messung der inneren Reibung", Hauptversammlung der Deutschen Gesellschaft für Materialkunde, Bochum, 6.-9. Juni 1995.
• H. Fritsch. R. Mikuta, P. Hauptmann, D. Scholz, E. Peiner, A. Schlachetzki, "Mikromechanische resonante Vibrationssensoren - Neue Möglichkeiten für die Maschinen- und Produktzustandsdiagnostik", MIicro-Engineering '95, Stuttgart, 27.-29. September 1995.
• R. Mikuta, P. Hauptmann, H. Fritsch, D. Scholz, E. Peiner, A.Schlachetzki, "Verschleiß- und Maschinenzustandsdiagnosemittels mikromechanischer Vibrationssensoren unter Nutzung eines mechanischen Resonators", Tagungsband der 9. Kongressmesse für industrielle Messtechnik, MessComp '95, Wiesbaden, 5.-7.Sept. 1995, (Network, Hagenburg, 1995), 28-32.
• P. Hauptmann, R. Mikuta, H. Fritsch, E. Peiner, D. Scholz, A.Schlachetzki, "Vibrationssensoren auf der Basis des Resonanzeffekts für die Anwendung im Maschinen- und Anlagenbau", Tagungsband II der 2. Magdeburger Maschinenbau-Tage: Mechatronische Systeme im Maschinenbau - Quelle der Innovation, 14. u. 15. Sept.1995, 1-6.
• H. Fritsch, R. Mikuta, P. Hauptmann, D. Scholz, E. Peiner, A. Schlachetzki, "Mikromechanische resonante Vibrationssensoren für den Einsatz im Maschinen- und Anlagenbau", Innovationsmarkt SteP, Hannovermesse '96, 27. April 1996.
• D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta, P. Hauptmann, "Simulation und Fertigung mikromechanischer Strukturen für resonante Vibrationssensoren", Tagungsband zum 41. intern. wissenschaftl. Kolloq., (VDI/VDE Mikro- und Feinwerktechnik), Ilmenau, 23.-26. Sept. 1996, (W. Gens, ed.), (Technische Universität Ilmenau, 1996, ISSN 0943-7207) 141-146.
• R. Mikuta, H. Fritsch, P. Hauptmann, D. Scholz, E. Peiner, A. Schlachetzki, "Realisierter mikromechanischer resonanter Vibrationssensor zur Maschinendiagnose", Tagungsband zum 41. intern. wissenschaftl. Kolloq., (VDI/VDE Mikro- und Feinwerktechnik), Ilmenau, 23.-26. Sept. 1996, (W. Gens, ed.), (Technische Universität Ilmenau, 1996, ISSN 0943-7207)502-506.
• K. Fricke, E. Peiner, A. Schlachetzki, "Vibrationssensor mit optoelektronischer Schnittstelle", Tagungsband zur 4. SICAN-Herbsttagung "Mikroelektronik-Mikrosysteme", Hannover, 11./12. Nov., 1997, (SICAN, Hannover, 1997), 167-171.
• T. Iwert, H. Fritsch, R. Mikuta, P. Hauptmann, E. Peiner, A. Schlachetzki, "Diagnosesystem auf der Basis mikromechanischer Resonatoren zur Zustandsüberwachung von Wälzlagern", Tagungsband II der 3. Magdeburger Maschinenbau-Tage "Mechatronische Systeme im Maschinenbau - Quelle der Innovation", (Univ. Magdeburg,1997), 177-184.
• R. Mikuta, T. Iwert, H. Fritsch, P. Hauptmann, L. Rauchhaupt, E. Peiner, K. Fricke, A. Schlachetzki, "Diagnosesystem zur on-line-Überwachung prozess- und maschinentypischer Körperschallspektren mit CAN-Interface", Fachtagung Informations- und Mikrosystemtechnik, Univ. Magdeburg, 25.-27. März 1998, Tagungsband.
• R. Mikuta, E. Peiner, H. Fritsch, K. Fricke, P. Hauptmann, A.Schlachetzki, "Mikromechanischer Vibrationssensor mit sensornaher monolithisch integrierter Signalkonditionierung", 43. Intern. Kolloq., TU Ilmenau, 21.-24. Sept. 1998, Tagungsband.
• E. Peiner, M. Balke, H. Bartuch, S. Völlmeke, L. Doering, U. Brand, "Mikrotastsonden für die Erfassung geometrischer Merkmale in der Mikrosystemtechnik", Cluster-Meeting "Mess- und Prüftechnik für den Test von Mikrosystemen (MSTPrüf)", Nürnberg, 31.5./1.6. 2006, Tagungsband (VDI, 2006), ISBN 978-3-89750-144-7. 
• A. Stranz, Ü. Sökmen, E. Peiner, A. Waag, "NTV-Verbindung von nanostrukturiertem Silizium auf Saphir und auf Silber", 1. GMM-Workshop "Mikro-Nano-Integration", 12./13. März, 2009, Seeheim, GMM-Fachbericht 60, (VDE, Berlin, 2009). 
• Ü. Sökmen, M. Suleiman, A. Waag, A. Ababneh, H. Seidel, U. Schmid and E. Peiner, "AlN on Silicon Cantilever Resonators for Mass Sensing Fabricated Using ICP-DRIE", 248. PTB-Seminar, "Nanopartikelcharakterisierung", Braunschweig, 18.-19. Mai 2009.
• E. Peiner, Lutz Doering, "Cantilever tactile sensors for characterization of diesel injectors", Vortrag und Poster, 3. Innovation forum for Micro Technology, Villingen, 3. Feb. 2011.
• Uwe Brand, Erwin Peiner, “Robustes und hochpräzises Tastsystem für Rauheitsmessungen in Mikrobohrungen”, Fachtagung “Bohren in anspruchsvollen Dimensionen”, 11. und 12. 11. 2014, Mannheim, (Hanser, München, 2014).
• L. Doering, U. Brand, H.S. Wasisto, E. Peiner, „Hochgeschwindigkeitsmikrotaster für die Messung an Oberflächen von Strukturen mit großem Aspektverhältnis“, Kolloquium Mikroproduktion, IKV RWTH Aachen, 16. - 17. November 2015, Aachen.
• G. Hamdana, M. Bertke, T. Südkamp, H. Bracht, H. S. Wasisto, E. Peiner, "Hoch geordnete Nanodrähte hergestellt durch Self-Assembly von Nanopartikeln", Proc. 6. GMM-Workshop Mikro-Nano-Integration, (VDE Conference Publications, 2016, Duisburg).
• M. Bertke, G. Hamdana, W. Wu, M. Marks, H. S. Wasisto, E. Peiner, "Asymmetrische Resonanzfrequenzanalyse von in-plane elektrothermischeSiliziumcantilever für Nanopartikelsensoren",Proc. 6. GMM-Workshop Mikro-Nano-Integration, (VDE Conference Publications, 2016, Duisburg).
• J. Xu, J. Yang, W. Wu, G. Hamdana, M. Bertke, H. S. Wasisto, E. Peiner, "ZnO nanorods-patterned piezoresistive Si cantilevers for humidity sensors", Proc. 6. GMM-Workshop Mikro-Nano-Integration, (VDE Conference Publications, 2016, Duisburg).
• Uwe Brand, Lutz Doering, Sai Gao, Thomas Ahbe, Sebastian Bütefisch, Zhi Li, André Felgner, Rudolf Meeß, Karla Hiller, Erwin Peiner, Thomas Frank, Stefan Reusch, "Sensors and calibration standards for precise hardness and topography measurements in micro- and nanotechnology", Proc. 6. GMM-Workshop Mikro-Nano-Integration, (VDE Conference Publications, 2016, Duisburg).
• W. Wu, H. S. Wasisto, E. Uhde, E. Peiner, "Autarkes MEMS-Dosimeter für personenbezogenes Nanopartikel-Monitoring - Autarkic MEMS Dosimeter for Personal Nanoparticle Monitoring”, Proc. VDE-Kongress 2016, Mannheim.

Patents/Patent applications:

• C. Metz, A. Jacob, G. Oberschmidt, E. Lissel, A. Schlachetzki, H. Schröter, E. Peiner, H.-H. Wehmann, "Radarsensor und Radarantenne für ein Überwachen der Umgebung eines Kraftfahrzeuges", Deutsches Patent Nr. 199 51 123 vom 23. Oktober 1999, 13. November 2003. 
•  E. Lissel, A. Jacob, A. Schlachetzki, H.-H. Wehmann, E. Peiner, H. Schröter, G. Oberschmidt, C. Metz, "Radar sensor and radar antenna for monitoring the environment of a motor vehicle", internationale Patentanmeldung PCT/EP00/06010 am 28. Juni 2000, Veröffentlichung unter WO 01/09975 A2 am 8. Februar 2001. 
• ibid., gesonderte Anmeldung in den USA unter U.S. Serial No. 10/048,425 am 20. Juni 2000, Erteilung unter US 6,686,867 B1 am 3. Februar 2004. 
• E. Peiner, I. Behrens, L. Doering, "Vorrichtung zur Bestimmung topologischer und elektrischer Eigenschaften eines Probenkörpers", Deutsches Patent Nr. 103 00 988 vom 14. Januar 2003, 24. März 2005. 
• Lutz Doering, Erwin Peiner, Ingo Behrens, Björn Herold, "Scansonden-Mikroskop zur Bestimmung topologischer oder elektrischer Eigenschaften eines Probenkörpers sowie Verfahren zur Herstellung eines Sondenkörpers", Deutsches Patent Nr. 103 26 379 vom 12. Juni 2003, 5. April 2007.
• L. Doering, V. Nesterov, E. Peiner, "Mikrokraftsensor", Deutsches Patent Nr. 10 2010 012 701 vom 24. 3. 2010, erteilt am 17. 10. 2013.
• J. Kähler, E. Peiner, A. Stranz, A. Waag, "High temperature piezoresistive strain gauges made of Silicon-On-Insulator", US 2013/0068008 A1, WO 2012/141843 A3.
• Julian Kähler, Thomas Kruspe, Sebastian Jung, Gerhard Palm, Andrej Stranz, Andreas Waag, Erwin Peiner, "Method and Apparatus for Joining Members for Downhole and High Temperature Applications", US 2012/0292009 A1; WO 2012/161987 A1; GB000002511394A; NO000020131653A.
• Julian Kähler, Thomas Kruspe, Sebastian Jung, Andrej Stranz, Andreas Waag, Erwin Peiner, "Thermoelectric devices using sintered bonding", US 2012/0291454 A1; WO 2012/116107 A1; EP 2 810 310 A1.
• Stephan Merzsch, Gerhard Palm, Erwin Peiner, Andreas Waag, Frederik Steib,“Verfahren zur Herstellung eines oberflächenstrukturierten Gegenstands und Verwendung einer adhäsiven Folie”, DE 10 2013 111 372 B4.
• Erwin Peiner, Stephan Merzsch, Hutomo Suryo Wasisto, Andreas Waag, Erik Uhde, "Gerät und Verfahren zur Messung einer Aerosolkonzentration in einem gasförmigen Medium", DE 10 2014 007 977 A1; EP 2 952 875 A1.
• Erwin Peiner, Andreas Waag, Gerhard Palm, Ingrid Schall, Heinz Schall, "Verfahren zur Herstellung einer kristallinen Siliziumschicht und siliziumbasiertes Halbleiterbauelement”, DE 10 2016 117 182 A1; WO2018/050565 A1.

Lectures:

• E. Peiner, "Mikromechanischer Vibrationssensor für die Maschinenüberwachung", Vortrag im Rahmen des Graduiertenkollegseminars über nanoelektronische, mikromechanische und mikrooptische Systeme der Ruhr-Universität Bochum am 20. Januar1998, (invited).
• E. Peiner, "Silizium-Sensorik für die Maschinenüberwachung", Vortrag vor der Habilitationskommission, Gemeinsame Fakultät für Maschinenbau und Elektrotechnik der TU Braunschweig, am 7. Juni 1999.
• E. Peiner, "Nanostrukturen in Halbleitern",Wissenschaftlicher Vortrag vor der Gemeinsamen Fakultät für Maschinenbau und Elektrotechnik der TU Braunschweig im Rahmen des Habilitationsverfahrens am 7. Februar 2000.
• E. Peiner, "Heteromikromechanik auf Silizium", Vortrag im Rahmen des Graduiertenkollegseminars über Laser- und Teilchenspektroskopie der Universität Kaiserslautern am 9. Juni 2000, (invited).
• E. Peiner, "Sensorik mit Halbleitern", Antrittsvorlesungan der TU Braunschweig am 30. Juni 2000.
• E. Peiner, "Hetero-micromachining (HMM) - a novel technology", Vortragim Rahmen des Workshops "Entwicklungstendenzen in der Sensor- und Mikrosystemtechnik", Fa. µ-Sen Mikrosystemtechnik GmbH, TU Ilmenau Fachgebiet Mikrosystemtechnik, Saale-Net GmbH, 10.Juli 2000, (invited).
• E. Peiner, "Vibrationssensoren mit faseroptischer Auslesung für die Maschinenüberwachung", Workshop "OptischeTechnologien" im Rahmen der Veranstaltungsreihe zur"Mikrosystemtechnik in Niedersachsen", Göttingen, 20.September 2000.
• E. Peiner, "Mikromechanische Halbleiter-Sensoren",Vortrag bei der European Aeronautic Defense and Space Company (EADS) Airbus am 29. September 2000, (invited).
• E. Peiner, "Mikrosystemtechnik", Zweites Fachforum "Mechatronik - Funktions- und kosten-optimierte Systemlösungen", Regensburg, 21./22. Nov. 2001, (OTTI Technik Kolleg, Regensburg, 2001), 137-158 (invited). 
• E. Peiner "Halbleitersensorik für die Maschinenüberwachung", Kolloquium des Fachbereichs Elektrotechnik und Informationstechnik der Universität Kaiserslautern, Kaiserslautern, 14. Feb. 2002, (invited). 
• E. Peiner, "Mikrosystemtechnik", Drittes Fachforum des OTTI Technik Kollegs "Mechatronik - Funktions- und kostenoptimierte Systemlösungen", Würzburg, 13./14. Nov. 2002 (OTTI Technik Kolleg, Regensburg, 2002) (invited). 
• E. Peiner, "Professoren-Praktikum bei VW", 5. Treffen des Industrieberaterkreises der gemeinsamen Fakultät Maschinenbau und Elektrotechnik der Technischen Universität Braunschweig, Wolfsburg, 30. Okt. 2002, (invited). 
• E. Peiner, "Tastsonden für die Mikrometrologie", Technische Universität Ilmenau, 31. Feb. 2004, (invited). 
• E. Peiner, "Mikrosystemtechnik", OTTI-Profiforum "Mechatronik - Funktions- und kostenoptimierte Systemlösungen", Regensburg, 2./3. Feb. 2004 (OTTI Technik Kolleg, Regensburg, 2004) (invited). 
• E. Peiner, "Tastsonden für die Mikro- und Nanomesstechnik, Univ. Ulm, Abt. Halbleiterphysik, 27. Apr. 2004 (invited). 
• E. Peiner, "Mikromechanische Kragbalkensensoren", Technische Universität Bergakademie Freiberg, 22. April 2005, (invited). 
• E. Peiner, "Cantileverbauelemente für die Mikro-/Nanomesstechnik", Universität Dortmund, Fakultät für Elektrotechnik und Informationstechnik, 3. Oktober 2006 (invited). 
• E. Peiner, "Neue Technologien zur Erzeugung von Pyramidenstrukturen", Workshop "Fertigungstechnologien für Mikrosysteme", Landesinitiative Mikrosystemtechnik Niedersachsen, TU Braunschweig, 23. Okt. 2006 (invited). 
• E. Peiner, "Nanopartikelanalytik", 1. JOMC Statusseminar und 231. Helmholtzseminar, PTB, Braunschweig, 26. April 2007 (invited).
• E. Peiner, "Cantileversensoren für die Mikro-/Nanomesstechnik", Lehrstuhl für Mikromechanik, Mikrofluidik/Mikroaktorik, Univ. d. Saarlandes, Saarbrücken, 14. Feb. 2008 (invited).
• E. Peiner, "Piezoresistive Tastsensoren für die Fertigungsmesstechnik", Fakultät für Elektrotechnik und Informationstechnik der Otto-von-Guericke-Universität Magdeburg, 9. Jan. 2009 (invited). 
• E. Peiner, "Silizium-Tastsensoren für die Fertigungsmesstechnik", Fakultät für Maschinenbau der Leibniz Universität Hannover, 15. Jan. 2009 (invited). 
• E. Peiner, Lectures "Applications of MEMS Sensors" und "Basics of Electronic Devices, Circuits and Sensors" incl. Tutorial für die DAAD-Sommerschule "School on Fundamentals and Materials for Novel Sensors", 13.-24. Juli 2009, Rio de Janeiro (invited).
• E. Peiner, "Tastsensoren für die Erfassung geometrischer Merkmale in der Mikrosystemtechnik", Mikrosystemtechnik-Kolloquium, Technische Universität Hamburg-Harburg, 11. Nov. 2009 (invited).
• E. Peiner, "Cantilever Sensors for Micro-/Nanometrology", GMe Forum 2012, Society for Micro- and Nanoelectronics, c/o Inst. of Sensors and Actuator Systems, Vienna Univ. of Technol., March 29 and 30, 2012 (invited).
• E. Peiner, "Micro-/Nanostructured Silicon for Transducers", Kolloquium über aktuelle Fragen der Materialphysik, Inst. f. Materialphysik, Univ. Münster, 13. Nov. 2012 (invited).
• E. Peiner, "Chipmontage mit Drucksintertechnik/Die Attach using Pressure-Assisted Sintering for High-Temperature Applications", Vortrag im Rahmen der Eröffnung des neuen Standorts der Fa. Elsold GmbH & Co. KG in Ilsenburg, 27. Juni 2013 (invited).
• E. Peiner, "Piezoresistive microcantilevers for industrial micro/nanoscale sensing applications", Keynote Lecture auf dem 7th Intern. Symp. Precision Mechanical Measurements (ISPMM2015), August 7-12, 2015, Xia’men, Fujian, China (invited).
• H. S. Wasisto, W. Wu, E. Uhde, E. Peiner, "MEMS Sensor for Personal Nanoparticle Monitoring", Lecture on 7^th Forum on New Materials (CIMTEC 2016), Symp. M, June 5th - 9th, 2016, Perugia, Italy (invited).
• M. Bertke, J. Xu, H. S. Wasisto, E. Uhde, E. Peiner, "Resonant MEMS Sensors for Personal Air Quality Monitoring”, Vortrag in Session "MEMS Sensoren", SENSOR-Kongress 2017, 30. Mai – 01. Juni, Nürnberg (invited).
• E. Peiner, “Vertical semiconductor nanowire arrays: from thermoelectric generator to multi sensor platform”, Keynote Lecture on 4^th International Symposium on Frontier Applied Physics (ISFAP 2018), ICE BSD, 1-2 November 2018, Tangerang, Banten, Indonesia (invited).

• M. Fahrbach, J. Xu, B. Bodermann, Z. Li, U. Brand, J. K. Prüßing, H. Bracht, E. Peiner, “Semiconductor Nanowire Arrays for Energy Harvesting – Fabrication and Characterization”, SOTA Lecture on euspen Special Interest Group (SIG) meeting: Structured & Freeform Surfaces, PTB, Germany, 6-8 October 2020 (invited).

• Michael Fahrbach, Jiushuai Xu, Andam Deatama Refino, Hutomo Suryo Wasisto, Erwin Peiner, “Nanowire arrays for energy harvesting and storage”, Physikalisches Kolloquium Sommersemester 2022, TU Kaiserslautern, 25. April 2022 (invited).
• M. Fahrbach, J. Xu, E. Peiner, "MEMS Cantilever Sensors", Lecture on 9^th Forum on New Materials (CIMTEC 2022), Symp. FC, Session FC-1 "Physical MEMS/NEMS; MOEMS/NOEMS", June 27th, 2022, Perugia, Italy (invited).

Habilitation:

• Silizium-Sensorik für die Maschinenüberwachung, (Shaker-Verlag, Aachen, 2000)
• Scientific lecture: Nanostrukturen in Halbleitern, TU Braunschweig (7. 2. 2000)
• Inaugural lecture: Sensorik mit Halbleitern, TU Braunschweig (30. 6. 2000)

PhD thesis:

• Herstellung metastabiler Legierungen binärer Systeme mit positiver Bildungsenthalpie mit Hilfe der ionenstrahl-induzierten Durchmischung, Universität Bonn (1988) 

Diploma thesis:

• Ionenstrahl-induzierte Durchmischungsexperimente an den Systemen Al-Os und Al-Au unter Verwendung einer neu errichteten Ultrahochvakuum-Aufdampfanlage, Institut für Strahlen- und Kernphysik, Universität Bonn (1985)

1960           born in Bad Münstereifel, Rhineland

School education:

1966-70     Catholic Elementary School, Antweiler, Kreis Euskirchen
1970-79     High School, Emil-Fischer-Gymnasium Euskirchen

Military service:

1979-80     Pionier-Batallion 610, Lübeck

Academic career:

1980-82     Intermediate Diploma: Physics/Mathematics, University Bonn
1982-85     Diploma: Physics, University Bonn, Elective: Computer Science

1985-88     PhD Dr. rer. nat., University Bonn, Prof. Dr. Konrad Kopitzki
1986-88     Graduate Scholarship, State of North Rhine-Westphalia
                    Metastable alloys through ion beam mixing
                    Minor: Theoretical Chemistry

1989-2000  Habilitation, Semiconductor Technol., TU Braunschweig, Univ. of Technology
                     Silicon sensors for condition monitoring

since 2015  Adjunct professor (außerplanmäßiger Professor)

Professional activities:

1985-88      Scientific student assistant/assistant, University Bonn, Institute for
                     Radiation and Nuclear Physics

since 1989  Group leader, Academic Director (since 2008), TU Braunschweig
                     Semiconductor sensors / microsystem technology 

1992            Research stay: Inst. f. Semiconductor Physics, Frankfurt (Oder)
                     Semiconductor metrology            

2002            Industry: Volkswagen AG Headquarters, Electron. Res. Div.
                     Cylinder pressure sensor  

Participation in committees:

since 2008   ITG-GMM Technical Committee 4.7 / Progr. Comm. of Workshop
                      Mikro-Nano-Integration

2009-17       Program Committee of the SPIE conference
                      Smart Sensors, Actuators and MEMS
2015-17       Co-Chair

2011-16       Board of Trustees of St. Jakobushaus, Goslar, Academy of the
                      Diocese of Hildesheim

2018             Guest-Editor (with H. S. Wasisto) of Special Issue in Sensors (mdpi)
                      Cantilever Sensor
2021             Guest-Editor (with U. Brand) of Special Issue in Sensors (mdpi)
                      Cantilever Sensors for Industrial Applications
2022             Guest-Editor (with U. Brand) of Special Issue in Sensors (mdpi)
                      Cantilever Sensors for Industrial Applications II
since 2019   Editorial Board of Sensors (mdpi)
since 2020   Editorial Board von Micromachines (mdpi)