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Institute of Microtechnology

Titelbild IMT Homepage

Welcome to the Institute of Microtechnology

Portrait Andreas Dietzel

On our website you find information about our institute and our current projects. Our staff will be glad to help you with specific questions.

The main research topics at the IMT range from numerical simulation methods and basic material science investigations to the development and fabrication of complex microsystems. The questions for microsystems technology typically arise from interdisciplinary research in the fields of mechatronics, process engineering and life sciences. In particular Lab-on-chip systems for medical, pharmaceutical and biological applications are developed, as well as sensors for aerospace and metrology, such as tactile micro-sensors for coordinate measurement technology. Another focus is on foil-type sensor systems based on flexible and stretchable substrates.

The IMT has a 300 sqm clean room with associated laboratories and modern equipment. This includes typical equipment for lithography-based microfabrication as well as a facility for microstructure patterning using femtosecond laser beams. Our equipment is an optimal basis for the research of microtechnological processes and for the development of microsystems. The IMT employs engineers in mechanical engineering, electrical engineering, bioprocess engineering, bioengineering and physics.

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