In the new laboratories within LENA, we have a setup at hand consisting of a Bruker Dimension Icon Atomic Force Microscope and a Renishaw inVia confocal Raman Microscope which are coupled together by a flexible arm.
This setup enables correlative microscopic measurements. For example, the topography and chemical composition of a sample can be determined in spatial resolution simultaneously.
The Atomic Force Microscope has an interface for the user to upgrade a 3D functionality, which also allows topographic measurements of the side profiles of three-dimensional structures to be recorded in a traceable manner1,2. The setup is currently taking place in strong collaboration with the PTB (Physikalisch Technische Bundesanstalt).
Contact: Tobias Voss
[1] G. Dai et al., Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFM, 2014 Meas.Sci.Technol. 25 044002, DOI: 10.1088/0957-0233/25/4/044002
[2] G. Dai et al., New developments at Physikalisch Technische Bundesanstalt in three- dimensional atomic force microscopy with tapping and torsion atomic force microscopy mode and vector approach probing strategy, 2012 Journal of Micro/ Nanolithography, MEMS, and MOEMS. DOI:10.1117/1.JMM.11.1.011004
