Infrastructure

Mask Aligner

SMTR Mask- and Bond-Aligner MA8BA8 from Süss MicroTec

(Funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) – Project number 501431011)

Ellipsometer

SENresearch 4.0 SER 850 DUV Spectroscopic Ellipsometer from SENTECH

(funded by the European Regional Development Fund (ERDF) within the framework of the MikroLED Lab (MLL) with project number 685219721)

PECVD - Plasma Enhanced Chemical Vapor Deposition

PlasmaPro 80 PECVD-tool for deposition of SiOx, SiN and a-Si layers from Oxford Instruments

(Funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) – Project number 455444208)

ICP-RIE dry etching tool

PlasmaPro 100 Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) with Cl2 and BCl3 from Oxford Instruments

ICP-RIE dry etching tool

PlasmaPro 100 Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) with CHF3, C4F8 and SF6 from Oxford Instruments

(Funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) – Project number 536792788)

Evaporation tool

UNIVEX 600 PVD-System with electron beam evaporator from Leybold

ALD - Atomic Layer Deposition

R200 Atomic Layer Deposition (ALD) for SiO2, Al2O3 and ZnO from Picosun

MOVPE - Metal organic chemical vapor phase epitaxy

Close-Coupled Showerhead (CCS) 3x2" for GaAlInN Epitaxy from Thomas Swan/AIXTRON

UV Ozone Cleaner

UV-1 UV and Ozone Cleaner from SAMCO

(funded by the European Regional Development Fund (ERDF) within the framework of the MikroLED Lab (MLL) with project number 685219721)

RTA - Rapid Thermal Annealing

RTP 200 HT Rapid Thermal Annealing from UNITEMP

Asher

Nano Low-pressure plasma system from Diener

(Funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany’s Excellence Strategy – EXC-2123 QuantumFrontiers – 390837967)

Asher

Atto Low-pressure plasma system from Diener, on the image in the upper right

(Funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany’s Excellence Strategy – EXC-2123 QuantumFrontiers – 390837967)

Sputter tool

DST3-TS Sputter tool from AMT

(funded by the European Regional Development Fund (ERDF) within the framework of the MikroLED Lab (MLL) with project number 685219721)

Various Wet Benches

Wet benches for chemical processes inluding BOE (Buffered Oxide Etch) 

High Temperature Oven

LHTG 200-300/30 High Temperature Oven from Carbolite Gero

(Funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) – Project number 494876313)

Wafer Saw

DAD3651 Automatic Wafer Saw from DISCO

Wafer Prober

TS 200-D Wafer Prober from ATV

(funded by the European Regional Development Fund (ERDF) within the framework of the MikroLED Lab (MLL) with project number 685219721)

SEM - Scanning Electron Microscope

MIRA3 SEM from Tescan 

Sputter Tool

Sputter Tool from Bestec