Dimensional Metrology for Precision Engineering

Course content

The students have an insight to the traceable dimensional metrology and are able to describe the research frontiers in this field. They can explain various high accurate dimensional metrology techniques, including length and angle metrology, photo mask metrology, coordinate metrology, form metrology, surface metrology and nanometrology. They are able to analyze transfer artefacts and standards applicable for calibrating dimension measuring devices. In addition, they can illustrate high accurate optical interferometry devices as well as self-calibration techniques.

• Introduction to Precision Engineering,
• Fundamentals of dimensional metrology (traceability, metre definition, realisation and dissemination, uncertainty, …),
• Optical interferometry (incremental and absolute length interferometers, air refractive index, nonlinearity errors,…),
• Overview of a broad range of length measuring devices,
• Length and angle metrology (gauge blocks, length comparators, angular comparators, error separation techniques…),
• Photo mask metrology (2D coordinate measuring device, photo mask standards, calibration, error separation technique…),
• Coordinate metrology (CMMs, error model, calibration standards/methods, virtual CMM, laser tracer, micro/nano CMMs…);
• Form metrology (Interferometry, stylus profilometry, flatness standards, deflectometry, traceable multiple sensor technique),
• Surface metrology (Stylus profile meters, optical techniques, AFM, Scatterometry, standards, reference software …),
• Nano dimensional metrology (AFM, SEM, TEM, DUV optical microscopy, scatterometry, nanoscale standards, calibration…);
• Thin film and hardness metrology (optical methods, ellipsometry, stylus profilometer, AFM, indentation …),
• Lab tours to PTB